使用轉印技術製作聚合物波導

Fabrication of Polymer Waveguides Using a Molding Process

莊育維(YU-WEI CHUANG)

指導教授 ： 何智廷

國立虎尾科技大學/工程學院/機械設計工程研究所/碩士(2013年)

https://doi.org/10.6827/NFU.2013.00003

摘要

由於聚合物波導具有低成本以及高處理能力，因此我們提出一個簡單且可以大量製造的方法來製作聚合物波導。
本研究是以不同折射率之高分子結構來製作聚合物波導，此研究結合了 LIGA-like及微模轉印技術(Micro-Molding Process)。
其製作過程首先我們透過黃光微影製程以負光阻SU-8旋塗於Si基板上製作波導圖形，再使用Ni-Co電鑄技術在波導圖案上製作出Ni-Co通道波導模仁，然後藉由微模轉印方法配合毛細管微成型技術(Micromolding in Capillaries, MIMIC)將模型(Pattern)轉至OG-169之上，然後在導光層曝光固化同時外加電場極化來改變UV高分子的折射率，來製作出聚合物波導。且為了減少波導中的殘留應力，在本文中波導的核心及包層皆使用相同材料。
本文經由光學顯微鏡(Optical Microscope , OM)觀察實驗過程，再以掃描式電子顯微鏡(Scanning Electron Microscope , SEM)做表面形貌量測，與紀錄實驗之結果，並研究探討。

關鍵字

聚合物波導 ； 類深刻模造 ； 微模轉印 ； 毛細管微成型 ； 電場極化

並列摘要

Polymer optical waveguides have attracted much attention due to their low cost and high process ability. Therefore, we propose a process which is easy, simple, and suitable for mass production. .
This project is to study the process by using different refractive index to fabricate a polymer waveguides along with a lithography-galvanic (LIGA)-like and micro molding process.
First, the negative photoresist SU-8 is used to fabricate waveguides pattern on a Si substrate, and the metal Ni–Co electroplating technique was applied to transfer the pattern into the Ni–Co mold. Next, a micro-molding process by using the Micro molding in capillaries process technology is used to pattern on the OG-169, and then at core layer the UV exposure is used for curing at same time, the electric field was applied to induce the change of the refractive index of the UV polymer. Finally, UV polymer waveguides is fabricated.
In this study, an optical microscope was used to OM observe experiment process, and then profiles of the devices were observed using scanning electron microscope (SEM).

並列關鍵字

Polymer Waveguides ； LIGA-like ； Micro molding ； Micromolding in Capillaries ； Electric Field

參考文獻

[28] 張美如,”積體光學高分子光波導及布拉格反射光波導之研製”,國立虎

[20] 黃培嘉, ”以簡單複製製程在高分子彎曲波導上製作高解析週期結構之

[21] H. Nishihara, “Masamitus haruna and toshiaki suhara”, Optical Integrated Circuites, McGraw.Hill Company, Inc.,2001.

[24] G. B. Lee, C. H. Lin, and G. L. Chang, Sens. Actuators A, Phys., 103, 165 ,2003

[1] Watanabe, M. Tsuchimori, A. Okada, and H. Ito, “Mode selective polymer channel waveguide defined by the photoinduced change in birefringence”, Appl. Phys. Lett., vol. 71, pp. 750–752, 1997.