利用二氧化釩進行光學影像式的氫氣感測元件開發

Optical Imaging Hydrogen Sensing Based on Vanadium Dioxide

陳暘(Chen, Yang)

指導教授 ： 陳國平

國立交通大學/光電學院/照明與能源光電研究所/碩士(2019年)

摘要

二氧化釩 (vanadium dioxide, VO2)是一種溫度相變的材料，同時也有氣體感測的能力，所以它成為了熱門的研究領域。在本論文中，我們展示了二氧化釩薄膜上方有島狀鉑 (Platinum, Pt)可以作為氫氣感測。當金屬態二氧化釩與氫氣反應後，由於氫氣導致二氧化釩的晶格擴張，在紅外光波段和電阻上會呈現劇烈變化。在4 %氫氣濃度的環境，發射率的下降使紅外線熱像儀上可以觀察到高達11度的變化，最後和基板達到熱偽裝的效果，同時在氫氣中電阻上升了大約兩個數量級，10分鐘電阻靈敏度高達320 %。通過改變氫氣濃度調控熱輻射的強度，並藉由紅外線熱像儀觀察氫氣反應成為了提供一種新穎的氣體感測方式。

關鍵字

二氧化釩 ； 氫氣 ； 熱成像 ； 電阻

並列摘要

Vanadium dioxide (VO2) is known as a temperature-dependent phase-change material. The significant insulator-to-metal transition (MIT) phenomenon can be observed when the temperature of VO2 changing over 68 °C. In this study, the hydrogen concentration dependent tunable hydrogenated VO2 (HVO2) thin film is demonstrated at the temperature around 130 °C with platinum nano islands on the top. As the metal state of VO2 reacted with hydrogen, due to the hydrogen-induced lattice expansion of VO2, the emissivity in infrared and the resistance would be changed dramatically. In the H2 concentration of 4 % sensing measurement, the results revealed that the sensors exhibit perfect reversibility and temperature monitored by the thermal imaging infrared camera decreased from 110 °C to 99 °C. The hydrogen control of thermal radiation would provide novel methods for gas sensing and adaptive coloration.

並列關鍵字

vanadium dioxide ； hydrogen ； thermal image ； resistance

參考文獻

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