近年來,使用近場奈米光子元件增強奈米粒子操縱中的光學力已有很廣泛的探索。通常會利用諸如矽之類的具有高折射率的材料來實現這些器件,已經有各種設計與應用提出並證明了。然而,矽本身的非線性損耗與水環境的吸收所產生的熱對於使用生物分子的應用是有害的。由於可以忽略的非線性效應,與更好的熱和機械性能,以及能在可見光至通信波段上的寬帶操作,我們開發並採用了折射率比化學計量Si3N4高的富矽氮化物,作為一維孔洞型光子晶體共振腔的材料並操作在1064 nm,並搭配缺口設計能提升奈米顆粒的捕捉能力。考量了不同的腔體幾何形狀與輸入耦合波導配置,針對光學力進行了優化。這種用於奈米粒子操作的富矽氮化物的平台元件非常適合生物應用。
Recently, near-field photonic devices have been widely explored to enhance optical forces in nanoparticle manipulation. Various designs are proposed and demonstrated, and materials with high refractive indices like silicon are generally utilized to realize these devices. However, thermal issue caused by serious absorption in water for silicon is detrimental for applications that require large optical powers and harmful for biomolecules. Owing to negligible absorption, better thermal and mechanical properties, and broadband operation over telecom to visible wavelengths, we employ and develop silicon-rich nitride with higher refractive index than stoichiometric Si3N4 as the material for 1D photonic crystal nanobeam nanocavity with notch design for nanoparticle trapping operating at 1064 nm. Different input coupling waveguide configurations and cavity geometries are considered and optimized for optical force. This silicon-rich nitride based platform for nanoparticle manipulation would be very suitable for bio-applications.
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