高速高功率單模態850nm波段面射型雷射

High speed,high power,single mode 850nm wavelength vertical cavity surface emitting lasers

楊立群(Li-chyung Yang)

指導教授 ： 許晉瑋

國立中央大學/資訊電機學院/電機工程學系/碩士(2007年)

摘要

我們利用鋅擴散製作出850nm波段的單模態面射型雷射，而沒有利用一般縮小氧化孔徑之方法來產生單模態，這可以減小元件之熱效應。我們氧化孔徑為9μm的元件，頻寬能達到8GHz，有一個較小的微分電阻為47Ω，最大輸出功率為3mW，而在不同電流注入時，頻譜也都是維持單模態，且頻譜我們是在動態調制下量測。而我們所製作出來的單模面射型雷射在本質頻寬方面也比我們所製作出來的多模面射型雷射來的大(31GHz vs. 17GHz)。且我們的單模面射型雷射有比較窄的發散角(80 vs. 200) ，且單模的面射型雷射在調準限度(alignment tolerance)方面也有比較好的表現。

關鍵字

半導體雷射 ； 面射型雷射

並列摘要

By utilizing the Zn-diffusion technique, we demonstrate a single-mode 850nm vertical-cavity surface-emitting laser (VCSEL) without greatly downscaling the diameter of oxide-confined aperture to minimize the thermal effect. The demonstrated device with a 9 μm active diameter can attain an 8GHz bandwidth, a
small differential resistance (~47Ω47Ω), a 3mW maximum output power, and sustain the
single-mode characteristic under dynamic operation and whole range of bias current.
According to the dynamic measurement results, our single-mode device can
eliminate the damping-limited bandwidth,which was observed in our multi-mode
control without the Zn-diffusion aperture, and has a larger intrinsic bandwidth
(31GHz vs. 17GHz) due to the elimination of mode competition effect. The
narrower divergence angle (80 vs. 200) means that the device exhibits a larger
alignment tolerance and much lower coupling loss when used with the standard
multi-mode fiber than those of the control sample.

並列關鍵字

vertical-cavity surface-emitting laser ； semiconductor laser

參考文獻

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