TiO2 has diverse functional application in solar cell, sterilization, degradation of organic pollutants and self-cleaning, however, the photocatalytic activities of titanium dioxide can effectively work only under ultraviolet (UV) light irradiation. In the hydrophilicity experiment, we get better photocatalytic activities films in using ion assisted deposition under anode voltage 40V than without using ion assisted deposition, after the UV light treatment 5 minutes, the contact angle was less than 10 degree. Besides, in the N2 ion assisted deposition experiment, to investigate N state in TiO2-xNx, and found that, the XPS peak at 396eV of N binding signal is clear observed .After the visible light treatment for one hour, the contact angle was 20 degree, and after the visible light treatment for two hours, the contact angle was less than 10 degree.