薄膜生物反應器處理觸控面板廠廢水之效能

Performance of Membrane Bioreactor Treating Wastewater from Touch Panel Factory

徐崇銘(Chungming_hsu)

指導教授 ： 余伍洲

國立屏東科技大學/工學院/環境工程與科學系所/碩士(2012年)

https://doi.org/10.6346/NPUST.2012.00032

摘要

面版上游製程會有各類酸鹼廢液如剝離液(Stripper)、蝕刻液(AL_Etch)、顯像液(TMAH25%)、清洗液(EBR-X)、硝酸、醋酸、硫酸及鹽酸等酸鹼廢水產出，其化學需氧量(Chemical Oxygen Demand, COD)及生化需氧量(Biological Oxygen Demand, BOD)排放大多超出科學園區納管標準。傳統大多以活性污泥法來進行處理，但處理後之COD及BOD仍偏高，常需要使用大量回收水或冷凝水來做放流水調勻以符合放流納管標準。
本研究以實際觸控面版製程廢水，在原有兼氣脫硝及接觸曝氣的生物處理單元後再導入薄膜生物處理程序(Membrane Bioreactor, MBR)，藉由監測MBR模組進/出流水之pH、懸浮固體物(SS)、COD、BOD來評估系統之處理效能。MBR經過兩個月連續操作測試，COD及BOD分別降為68.51 mg/L及46.22 mg/L（平均去除率可達80%及61%），而SS及pH分別為4.01及6.45（pH 5~9），出水通量調整，最終出水通量調整至2.13 m3/m2-d時，MBR產水之負壓不再隨之變化，處理後水質符合要求，放流水水質亦符合科學園區納管標準。
未來的發展可以在MBR系統後增加逆滲透(RO)模組或樹脂，使其水質達到回收的標準，一方面可減少廢水的產生，另一方面也可增加回收率，減少工業用水的需求量。

關鍵字

化學需氧量 ； 生化需氧量 ； 面版TS製程廢水 ； 薄膜生物處理器

並列摘要

Touch panel upperstream process will has the class acid/alkali wastewater as split solvent (Stripper), and etched solvent (AL_Etch), and developer solvent (TMAH25%), and cleaning solvent (EBR-X), and nitrate, and acetate, and sulfate, and hydrochloride etc. The discharge of chemical oxygen demand (COD) and the biological oxygen demand (BOD) are higher than the influent standards of sewage of the science park. The wastewater is conventionally treated with activated sludge process, but the COD after processing and BOD are still high. It is often necessary to employ massive amount of recycled or condensed water to evenly mix with the effluent in order to meet sewage influent standards.
This study based on actual touch panel process wastewater treatment, the facultative anaerobes denitrification and contact aeration, imported with biological treatment processes Membrane Bioreactor (MBR). By monitoring MBR module inlet/outlet water pH, suspended solids (SS), COD, BOD to assess system performance. After two months of continuous operation MBR module, COD and the BOD respectively drop for 68.51 mg/l and 46.22 mg/l (average removal rate can up 80% and 61%), and SS and the pH respectively for 4.01 and 6.45 (pH 5~9). By adjusting water flux, when it is in 2.13 M3/M2-d, the negative pressure of treated water of MBR no longer with of changes, and treated water quality meet requirements. the quality of effluent water also satisfied that the standard of water quality limit with the Scientific Park.
Future development may focus on enhancement of the reverse osmosis (RO) module or resin after the MBR system in order to achieve the water quality standards sufficient for recycling. This will reduce wastewater production and increase water recovery, reducing the water demand of industry.

並列關鍵字

chemical oxygen demand ； biochemical oxygen demand ； TS process wastewater ； Film bio-processors

參考文獻

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