鍍膜轉速對AISI304不銹鋼電弧披覆TiN/CrN多層膜特性之影響

Effect of Rotation Rate on Characterisitics of AISI 304 Stainless Steel Arc-deposited TiN/CrN Multilayer Films

李函霓(Han-Ni Lee)

指導教授 ： 許正勳

大同大學/工程學院/材料工程學系所/碩士(2012年)

摘要

本研究利用陰極電弧沉積(Cathodic arc deposotion, CAD)系統，以不同鍍膜轉速(1,2,4,8rpm)之製程披覆TiN/CrN多層膜於AISI 304不銹鋼基材上，然後進一步分析各鍍膜結構、特性(包括粗糙度、化學組成、附著性)以及進行AISI 304不銹鋼鍍膜前後之磨耗、沖蝕、極化腐蝕及浸泡腐蝕試驗，以探討載台轉速對AISI 304不銹鋼表面性質之影響。
實驗結果顯示，此鍍膜結構主要是為F.C.C之TiN/CrN多層膜形態，當載台轉速為4rpm時，所獲得的TiN/CrN多層膜之結構最緻密、表面粗度最小(Rq值=0.328.μm)及附著性最佳(HF1)。在耐磨耗方面，當轉速為4rpm時，由於其H/E值最高，故相對地其摩擦係數最小(0.5) 也較耐沖蝕。在耐蝕性方面，不論是3.5 wt% NaCl或10 vol% HCl腐蝕媒介環境，披覆TiN/CrN多層膜之基材，耐腐蝕性質皆能夠獲得提升，尤其是在轉速4rpm時所沉積之膜層提升效果最為優異。

關鍵字

耐腐蝕 ； AISI 304不銹鋼 ； 陰極電弧沉積 ； TiCrN多層膜 ； 耐磨耗

並列摘要

In this study, the TiCrN multilayered coating were deposoted on AISI 304 stainless steel substrate by cathodic arc deposotion (CAD) system using the different rotation rates (1,2,4,8 rpm). Then the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, wear tests, erosion test,polarization tests, and immersion tests were also performed for exploring the effect of rotation rate on the wear and corrosion behavior of the coated AISI 304 stainless steel.
The experiment results showed that the TiN/CrN multilayer mainly was a F.C.C structure. When the rotation rate was set at 4rpm, the TiN/CrN multilayer obtained had a dense structure, smallest surface roughness (Rq value = 0.328 μm ), and the best adhesion (HF1). In wear resistance, the TiN/CrN multilayer(4rpm) had a lowest friction coefficient (0.5) due to the highest H/E value. Moreover, the optimum coating(4rpm) had better corrosion resistance in 3.5 wt% NaCl and 10 vol% HCl solutions, respectively.

並列關鍵字

Corrosion resistance ； AISI 304 stainless steel ； Cathodic arc deposition ； TiCrN multilayer coatings ； Wear resistance

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