以立體螺旋型電極應用於矽尖錐結構之研究

Fabrications of Porous Silicon Tips by solenoidal-type Electrodes

林嘉洤(Jia-Chuan Lin) ； 沈廉超(Lien-Chao Shen) ； 黃國閔(Kuo-Min Huang)

《華岡工程學報》 22期 (2008/06) Pp. 7-12

https://doi.org/10.29987/CCUHKJE.200806.0002

摘要

在本研究中，藉由陽極電化學蝕刻的方式可以產生高深寬比的矽尖錐結構。陽極處理的過程中，立體螺旋電極取代原先實驗中所使用之平面電極。立體螺旋型態的電極可以產生空間電場的改變造成蝕刻深度的週期性變化。矽尖錐的結構能夠應用在場發射元件上。有趣的是線圈的圈數能夠影響矽尖錐的結構。為了更進一步的研究，比較螺旋電極與平面極，經場發射電子顯微鏡(JEOL JSMFESEM-6335F)分析不同參數試片之矽尖錐薄膜，此薄膜的輝光特性經由光激發光譜儀(PL)進行分析。

關鍵字

多孔矽 ； 矽尖錐 ； 輝光 ； 電子顯微鏡 ； 立體螺旋電極 ； 多孔矽微結構

並列摘要

In this study, silicon-tips with high-aspect-ratio can be obtained by electrochemical anodization. During the anodization process, three-dimensional solenoidal-type electrodes are originally designed instead of conventional plate-type electrodes in the experiments. The solenoidal-type electrode can produce a spatial variation of electrical field which causes a period variation of etching depth and a silicon-tip structure. The silicon-tip structures can be widely used in field-emission device applications. It is also interesting that the number of coils would affect the silicon-tip structures. To get a further exploration, the microstructure analysis on silicon-tip film is studied by SEM for comparing the difference cases between the solenoidal-type and conventional plate-type electrodes. In addition, the photoluminescence properties of such silicon-tip films are investigated by PL system.

並列關鍵字

Porous silicon ； Silicon tips ； Photoluminescence PL ； SEM ； Electrode ； Anodization ； Microstructure