ZnO one-dimension nanostructures are possessed of excellent properties, such as mechanical, piezoelectrical, gas sensing, optical, and electrical properties. Based on these properties, However, most of these device applications require a high degree of precision regarding alignment, position, and size of the ZnO nanowires to obtain the good performance in purpose. In this paper, we present a novel method to achieve selective growth. Using microcontact printing to define the gold catalyst patterns, the poly dimethyl siloxane (PDMS) elastomeric stamp was replicated by the master mold with cavity types. Followed by printing of self-assembled monolayers (SAM) and wet etching, the gold catalyst patterns were successfully defined on the substrates. Subsequently, ZnO nanowires were grown via vapor-liquid-solid (VLS)epitaxy mechanism catalyzed by the gold pattern to achieve selective growth. This integrated process presents the low cost method to position the ZnO one-dimension nanostructures precisely and provides a promising way to create ZnO nanostructures for applications as two-dimensional photonic crystal, sensor arrays, and optoelectronic devices.