圖案化藍寶石基板形貌對LED封裝效率影響

Effect of Patterned Sapphire Morphology on LED Package Efficiency

劉正毓(Cheng-Yi Liu) ； 林鴻宇(Hong-Yu Lin)

《光學工程》 122期 (2013/07) Pp. 32-37

摘要

本篇文章利用無黃光微影製程製作不同基板形貌的圖案化藍寶石基板，以金屬有機化學沉積氮化鎵薄膜，並分析其薄膜品質。在標準水平式發光二極體製程下，我們發現以特定形貌無光罩圖案化藍寶石基板的發光二極體其裸晶輸出功率跟目前常用的陣列式圓餅形基板發光二極體接近。在白光封裝後，發現圖案大小為5微米和4微米的基板其發光二極體封裝效率比2微米基板高。於本文中我們將針對白光封裝時光取出效率增加和螢光粉吸收進行分析。

關鍵字

圖案化藍寶石基板 ； 發光二極體 ； 光萃取效率 ； 封裝效率

並列摘要

Patterned sapphire substrates (PSS) are fabricated without lithography. Because the patterned sapphire substrate forms naturally, we name it as NPSS. The GaN LED epi-layers are grown by using MOCVD. We analyze the dislocation density and the residual stress of the GaN epi-layer. After the horizontal LED chip process, we find out that the output power of NPSS LED is close to the LED chip chip on the regular patterned sapphire substrate (RPSS). As for white light LED, we find out that LEDs with 5 μm and 4 μm substrate have higher package efficiency than the LEDs on 2 μm and RPSS. Because the light extraction efficiency (LEE) and phosphor absorption affect the white light LED package optical efficiency. To investigate this mechanism, we design experiment to decouple these factors.

並列關鍵字

PSS ； LED ； LEE ； package optical efficiency