具導電性之氮化鈦一氮化矽複合材料的加工與特性研究

Manufacture and Properties of Electro-Conductive TiN-Si3N4 Particulate Composites

劉見成(C. C. Liu) ； 黃肇瑞(J. L. Huang)

《材料科學與工程》 34卷1期 (2002/03) Pp. 61-65

https://doi.org/10.6409/JMSE.200203.0061

摘要

本文研究於Si3N4起始粉末中添加TiN作為第二相，氮化鈦含量在10到40%的體積比，於氮氣氛中溫度為1850℃作熱壓燒結，而第二相TiN的含量及粒度大小會影響微結構的變化、機械性質、電阻率及放電加工性能。當TiN含量在20vol%有較佳的破壞韌性值，而含量在40vol%其電阻率為3×10^(-3)Ω.cm時，適合做放電加工切削，由微放電加工切削結果，證實具導電性TiN/Si3N4陶瓷複合材料可加工高深寬比的微細孔徑。

關鍵字

氮化矽 ； 放電加工 ； 破壞韌性

並列摘要

Particulate ceramic composites composed of Si3N4 matrix and dispersing TiN particles were sintered in N2 atmosphere at 1850℃ for 1h. The physical and mechanical properties of these composites containing 10, 20, 30 and 40vol% TiN were evaluated. The microstructure, strength, fracture toughness and electrical resistivity of Si3N4 containing two different sizes of TiN were investigated. The size and content of TiN particles were found having effects on the strength, toughness and electrical resistivity of TiN/Si2N4 composites. A low electrical resistivity of 3×10^(-3)Ω.cm was obtained in 40vol% TiN/Si3N4 composites and it was suggested that this composite would be appropriate for the machining of EDM. The results demonstrated the possibility of machining structural ceramics by the micro-EDM method through the incorporation of conductive toughening phases.

並列關鍵字

Si3N4 Electrical discharge machining ； Fracture toughness