Title

The Sensitivity Analysis of a MEMS Microphone with Different Membrane Diameters

DOI

10.6119/JMST.201012_18(6).0002

Authors

Cheng-Ta Yang

Key Words

MEMS microphone ; sensitivity ; diameter ; coupling

PublicationName

Journal of Marine Science and Technology

Volume or Term/Year and Month of Publication

18卷6期(2010 / 12 / 01)

Page #

790 - 796

Content Language

英文

English Abstract

In MLMS capacitive microphone design, it is very critical to get highest yielding rate and sensitivity as the two major factors dominate structure design of microphone. The central-post MEMS microphone is introduced in this paper to differentiate from traditional fixed membrane boundary microphone since the construction is simple and only few masks are required in the process so that the yielding can he greatly enhanced. Thus, it is necessary to find the relationship between the sensitivity and dimension of the diameter of the membrane. The main research steps described in this paper include using CoventorWarer to develop one analysis model of MEMS microphone with coupled electro-mechanic system and analyzing the relationship between the sensitivity and the dimension of the diameter of the membrane.

Topic Category 基礎與應用科學 > 海洋科學
工程學 > 市政與環境工程