薄板式雙光壓電氣閥之開發

Development of optopiezoelectric pneumatic valve based on bimorph actuator

黃誠印(Cheng-Yin Huang)

指導教授 ： 李世光

共同指導教授 ： 許聿翔

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2018年)

https://doi.org/10.6342/NTU201802861

摘要

本論文開發一以雙層壓電致動器為核心的氣體閥門，目的是利用壓電材料的逆壓電效應的變形，去控制前端氣體泵浦的流量及氣壓，達到氣閥的功能。本研究將雙層壓電薄板設計為一維系統，在雙簡支端的邊界條件下，透過結構本身抗彎的能力擋住上游的氣體壓力，並將兩片鋯鈦酸鉛壓電薄板以極化方向相對的方式黏貼在不鏽鋼薄板的兩端，當給予一電場於此三層結構上下兩端的電極時，因為不同的極化方向，故上下兩片壓電材料會分別產生拉伸以及壓縮的機械形變，產生彎曲變形將氣體放出，同時利用電訊號輸入至壓電材料時所會產生來回的往復運動，達到可調變流阻及控制壓力的目的。
為驗證所設計出的氣體閥門的功能，本研究針對不同長度的雙層壓電制動器(55mm、50mm、45mm)，在不同的驅動電壓及驅動頻率下進行分析。經過實驗證實，長度55mm及電極面積為100%的雙層PZT，在中間夾一層厚度0.1mm的不鏽鋼板的設計下，以1Hz方波320Vpp的驅動電壓下，能夠調變系統達10倍的壓力差。最後，本研究結合TiOPc光敏材料製作出的光壓電氣體閥門，引入光控功能，達到在照光及未照光的情狀下能夠達到63%的調變能力，完成光控流量的功能。

關鍵字

壓電閥門 ； 雙層壓電制動器 ； 氣體閥門

並列摘要

In this research, we present a pneumatic valve based on bimorph piezoelectric material. The converse effect of piezoelectric materials is used to precisely control the flow rate and pressure in the output port. The bimorph structure was designed to be a one-dimensional plate to reduce the overall size of the piezoelectric actuator. The piezoelectric laminate was slightly compressed to create a pre-stressed condition against the input pressure. The pressure released as the electrical signal is applied to PZT and activated bending deformation. The performances of this system were studied and evaluated, including frequency response, pressure drop, and flow rate.
The piezoelectric actuator was fabricated by attaching two 5 mm wide, 45 mm, 50 mm, or 55 mm long and 0.2 mm thick PZT laminate. With 0.1mm thick stainless steel plate in the middle to form a stainless steel bimorph. With different percentage of the surface electrode (50%, 75%, 100%) design. Two PZT layers are able to create different deformation. The level of the movement was studied under a different driving voltage and operating frequency. Experimental results showed that in the design of 55 mm length 100% electrode and a 0.1 mm shim in the middle can create almost ten times pressure difference with 1Hz square wave 320Vpp driving condition. The optopiezoelectric composite was also introduced to develop an optical controllable valve, and a 63% controllability was achieved.

並列關鍵字

Bimorph piezoelectric material ； converse piezoelectric effect ； Frequency response ； Pressure drop ； Flow rate ； pneumatic valve

參考文獻

[1] S. Zaehringer, M. Menacher, P. Kirchner, and N. Schwesinger, "Normally closed piezoelectric micro valve," in 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010, pp. 105-109.

[2] B. D. Iverson and S. V. Garimella, "Recent advances in microscale pumping technologies: a review and evaluation," Microfluidics and Nanofluidics, vol. 5, no. 2, pp. 145-174, 2008/08/01 2008.

[3] J. Melin and S. R Quake, Microfluidic Large-Scale Integration: The Evolution of Design Rules for Biological Automation. 2007, pp. 213-31.

[4] M. N. D, "Hydraulic Control System 1st edn (Hoboken, NJ: Wiley)," pp. pp 179–87, 2005.

[5] T. Dolżan et al., "Design of transdermal drug delivery system with PZT actuated micropump," in 2014 37th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO), 2014, pp. 96-99.