金屬奈米複合結構薄膜之光學特性及應用研究

本論文研究以同步濺鍍(co-sputtering)法製作金與二氧化矽(Au-SiO2)之奈米複合(nano-composite)薄膜結構，在兩支濺鍍槍(sputtering gun)上分別為金(Au)與二氧化矽(SiO¬2)的靶材(target)，藉由改變濺鍍槍的電源供應器(power supply)所提供的濺鍍功率，控制兩種材料的混成比例及濺鍍條件，可調整薄膜中金奈米顆粒的粒徑尺寸、形狀及分佈等參數，並由穿隧電子顯微鏡(Transmission Electron Microscope, TEM)影像觀察其微觀結構。奈米光學薄膜的研究，以Z軸掃描技術(Z-scan)、近場光學顯微術(Near-field Optical Microscopy, NSOM)以及泵-探(pump-probe)光學量測等實驗方法，探討特殊奈米複合結構薄膜之非線性光學性質、近場光學效應、侷域光學性質、光熱性質及表面電漿子共振等相關的物理性質及其應用。

關鍵字

金屬；奈米複合；薄膜；非線性光學光學；奈米光學

並列摘要

In this thesis, a co-sputtering method is used to fabricate the Au and SiO2 nanocomposite thin film. Two targets of Au and SiO2 are simultaneously rf-sputtered with proper Argon pressure. A nanocomposite thin film consisted of Au and SiO2 can be fabricated, and the volume ratio of Au to SiO2 is controlled by the powers of sputtering guns. The transmission electron microscope (TEM) micrographs of this 15 nm Au-SiO2 nanocomposite thin film show that irregular shape Au nanoparticles are embedded in SiO2 with random distribution. The sizes of these nanoparticles are from 2 to 10nm. The nonlinear optical properties, near-field optical properties, localized optical effects, optical-thermal responses, surface plasmon resonaces and its applications of Au-SiO2 nano-composited thin film are invegated by methods of Z-scan experimental technique, near-field optical microscopy and pump-probe optical measurements.

並列關鍵字

metallic ； nano ； nano-composite ； thin film ； nonlinear optics ； nano optics

參考文獻

[ 4.8] 徐偉智，「超解析近場光碟材料之研究，」博士論文，國立台灣大學材料科學與工程學研究所 (2004)。

[ 1.11]蔡定平，「近場光學顯微術簡介，」物理雙月刊，第十八卷第三期，375-384頁 (1996).

[ 1.26] W. –C. Liu, C. –Y. Wen, K. –H. Chen, W. C. Lin and D. P. Tsai, “Near-field images of the AgOx-type super-resolution near-field structure,” Appl. Phys. Lett. 78, 685-687 (2001).

[ 1.6] E. Abbe, “Betrage zur Theorie der Microscope und der Microscopischen Wahrehmung.” Arch. Mikrosk. Anst. 9, 413-468 (1873).

[ 1.7] Lord Rayleigh, “On the theory of optical images with special reference to the microscope,” Philos. Mag. 5, 167-195 (1896).

國際替代計量

金屬奈米複合結構薄膜之光學特性及應用研究

全文下載

主題瀏覽