Title

可調變微機電光學回射器陣列之分析與製作

Translated Titles

The analysis and fabrication of switchable MEMS optical retro-reflector arrays

Authors

趙耿興

Key Words

可調變回射器 ; 光學辨識器統 ; 貓眼回射器 ; Retro-reflector ; optical ID

PublicationName

臺灣大學光電工程學研究所學位論文

Volume or Term/Year and Month of Publication

2010年

Academic Degree Category

碩士

Advisor

蔡睿哲

Content Language

英文

Chinese Abstract

近年來因為科技快速的發展,許多日常生活用品如身份識別證、貨幣…等,已逐漸改由電子產品的形式呈獻。像是現在人手一張的優遊卡、信用卡、提款卡或是住家大樓、公司行號的身份識別證。本篇論文利用光的準直、不易發散特性,來改善當前RFID (Radio frequency Identification)電磁波向四面八方傳播,資料易被竊取的缺點。而Corner cube retro-reflector以及貓眼回射器(Cat’s eyes retro-reflector)元件,則於光學辨識系統中扮演重要角色。進入回射器的光線,將依循原路徑回射至訊號發送源。藉此系統可辨別辨識物資料之真偽或電子貨幣交易。 我們以Fred光學追跡軟體模擬回射器陣列的表現,找出理想的元件深、寬以及週期比。並模擬於實際製程所可容許的誤差範圍,以及可採用的調變機制。藉此找出合適的製程方法與調變模式。 最後,我們採用光阻熱流法(photoresist thermal reflow)製作微透鏡及微反射面鏡,經過組裝後得到貓眼回射器陣列。並於其中加入調光薄膜(smart film),藉由電壓控制調光薄膜的光穿透率,來達到動態圖形傳遞的功能。動態圖形之傳遞,除了與RFID同樣可於時間軸上做資訊加密之外,還多了空間上資訊加密之特性。因此此光學辨識系統(Optical identification system),可大大提升資訊傳遞的安全性及隱密性。

English Abstract

Because of the fast paced development of technology, many daily necessities such as currency and ID card have transformed into electrical products gradually. Examples of applications include product identification, in a supply chain, easycard, and making transactions with VISA payWave, etc. In this thesis, we utilize light, which is collimated and directional, to improve the RFID (radio frequency identification), whose radio frequency signal propagate isotropically, lest the information to be intercepted and eavesdropped. In this way, the corner cube retro-reflector and cat’s eyes retro-reflector play an important role in the optical identification system. The optical signal into the retro-reflector will be reflected along its incoming path to the original emitter. By this system, we can distinguish the items or to do the electronic transactions. The ray tracing software Fred was used to simulate the performance of the retro-reflector arrays and to find the optimized height, width and period. Also, we find out the tolerance of verticality of the vertical sidewall in fabrication process and the proper modulation mechanisms. Finally, we use photoresist thermal reflow method to fabricate the micro lens array and micro reflecting mirror. After the assembly with smart film, the switchable cat’s eye array is attained. By controlling the applied voltage, the transparency of smart film is changed. Hence, we can transmit the dynamic image and increase the security of the system.

Topic Category 電機資訊學院 > 光電工程學研究所
工程學 > 電機工程
Reference
  1. [1] L. Ling-Han, A. Higo, M. Kubota, M. Sugiyama, and Y. Nakano, "A novel etching-oxidation fabrication method for 3D nano structures on silicon and its application to SOI symmetric waveguide and 3D taper spot size converter," in Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on, 2008, pp. 27-28.
    連結:
  2. [2] V. Milanovic and L. Wing Kin, "Fast and high-precision 3D tracking and position measurement with MEMS micromirrors," in Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on, 2008, pp. 72-73.
    連結:
  3. [4] I. Glaser, S. Green, and I. Dimkov, "Optical smart card using semipassive communication," Optics Letters, vol. 31, pp. 712-714, Mar 15 2006.
    連結:
  4. [5] M. Inami, N. Kawakami, and S. Tachi, "Optical Camouflage Using Retro-Reflective Projection Technology," in Proceedings of the 2nd IEEE/ACM International Symposium on Mixed and Augmented Reality, 2003, p. 348.
    連結:
  5. [8] W. R. Cox, T. Chen, and D. J. Hayes, "Micro-Optics Fabrication by Ink-Jet Printers," Opt. Photon. News, vol. 12, pp. 32-35, 2001.
    連結:
  6. [9] A. Lundvall, F. Nikolajeff, and T. Lindstrom, "High performing micromachined retroreflector," Optics Express, vol. 11, pp. 2459-2473, Oct 6 2003.
    連結:
  7. [10] T. Dillon, A. Sure, J. Murakowski, and D. Prather, "Continuous-tone grayscale mask fabrication using high-energy-beam-sensitive glass," Journal of Microlithography Microfabrication and Microsystems, vol. 3, pp. 550-554, Oct 2004.
    連結:
  8. [11] K. I. Jolic, M. K. Ghantasala, and E. C. Harvey, "Excimer laser machining of corner cube structures," Journal of Micromechanics and Microengineering, vol. 14, pp. 388-397, Mar 2004.
    連結:
  9. [12] E. Brinksmeier, R. Gläbe, and C. Flucke, "Manufacturing of molds for replication of micro cube corner retroreflectors," Production Engineering, vol. 2, pp. 33-38, 2008.
    連結:
  10. [13] C. S. Chang, T. S. Chu, L. S. Huang, C. Y. Chang, S. Y. Zeng, M. H. Wen, and Y. K. Yen, "A novel addressable switching micro corner cube array for free-space optical applications," in Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, 2003, pp. 279-282.
    連結:
  11. [14] M. K. Kilaru, B. Cumby, and J. Heikenfeld, "Electrowetting retroreflectors: Scalable and wide-spectrum modulation between corner cube and scattering reflection," Applied Physics Letters, vol. 94, pp. -, Jan 26 2009.
    連結:
  12. [15] M. K. Kilaru, B. Cumby, and J. Heikenfeld, "Electrowetting retroreflectors: Scalable and wide-spectrum modulation between corner cube and scattering reflection," Applied Physics Letters, vol. 94, pp. 041108-041108-041103, 2009.
    連結:
  13. [16] K.-h. Chao, C.-d. Liao, and J.-c. Tsai, "Array of Cat's Eye Retro-Reflectors with Modulability for an Optical Identification System," in Proc. of 2010 International Conference on Optical MEMS & Nanophotonics, 2010, pp. 7-8.
    連結:
  14. [17] K. Aljasem, A. Seifert, and H. Zappe, "Tunable multi-micro-lens system for high lateral resolution endoscopic optical coherence tomography," in Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on, 2008, pp. 44-45.
    連結:
  15. [18] E. Brinksmeier, R. Gla¨be, and C. Flucke, "Manufacturing of molds for replication of micro cube corner retroreflectors," Prod. Eng. Res., 2008.
    連結:
  16. [19] A. Lundvall, F. Nikolajeff, and T. Lindstrom, "High performing micromachined retroreflector," Opt. Express, vol. 11, pp. 2459-2473, 2003.
    連結:
  17. [20] B. P. Keyworth, D. J. Corazza, J. N. McMullin, and L. Mabbott, "Single-step fabrication of refractive microlens arrays," Appl. Opt., vol. 36, pp. 2198-2202, 1997.
    連結:
  18. [21] Y. Ishii, S. Koike, Y. Arai, and Y. Ando, "Ink-jet fabrication of polymer microlens for optical-I/O chip packaging," Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, vol. 39, pp. 1490-1493, Mar 2000.
    連結:
  19. [22] D. M. Hartmann, O. Kibar, and S. C. Esener, "Characterization of a polymer microlens fabricated by use of the hydrophobic effect," Optics Letters, vol. 25, pp. 975-977, Jul 1 2000.
    連結:
  20. [23] Z. D. Popovic, R. A. Sprague, and G. A. N. Connell, "Technique for monolithic fabrication of microlens arrays," Appl. Opt., vol. 27, pp. 1281-1284, 1988.
    連結:
  21. [24] [Online]. Available: http://www.smart-film.com.tw/.
    連結:
  22. [3] T. S. Chu, L. S. Huang, C. Y. Chang, C. S. Chang, W. F. Ye, M. H. Wen, and C. C. Yang, "A new addressable corner micromirror array for free-space optical applications," in Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on, 2002, pp. 45-46.
  23. [6] D. J. Hayes, "CAT'S EYE RETRO-REFLECTOR ARRAY CODING DEVICE AND METHOD OF FABRICATION," US 7,152,984 B1, Dec. 26, 2006.
  24. [7] [Online].Available: http://www.edmundoptics.com/onlinecatalog/displayproduct.cfm?productid=2088.