透過您的圖書館登入
IP:3.134.104.173
  • 學位論文

微保險絲製造與測試

Fabrication and Test of Micro Fuses

指導教授 : 康尚文

摘要


本研究利用濕蝕刻製程技術在環氧玻璃感光電路板上製作微銅保險絲。保險絲結構尺寸長為600μm,寬為80μm,銅層厚度為30μm。 在數值模擬研究中,利用ANSYS軟體對保險絲輸入不同的電壓來預測溫度的變化。微保險絲經由控制蝕刻時間來獲得不同的截面積。實驗時,輸入電源以0.1安培電流為增加間隔,一直輸入到保險絲之熔斷電流,並擷取保險絲的特性變化。 實驗結果顯示量測溫度和模擬的數據一致。且所製作三種額定電流1.15安培、1.60安培及 2.10安培之微保險絲,在額定電壓3.6伏特中皆測試通過國際標準安全規格。

關鍵字

環氧玻璃 濕蝕刻 微保險絲 ANSYS

並列摘要


In this study, a micro copper fuse was developed on glass epoxy plate by wet etching technology. The fuse structure has a length of 600μm and a width of 80μm.The thickness of the copper layer is 30μm. Numerical simulation was studied with ANSYS software to predict the temperature distribution of micro fuse with variation of input voltage. Different cross-section area of micro fuse was obtained from controlling etching time. The characteristic of the fuse were evaluated experimentally by input power to its blowing current with an increment of 0.1A. Measured temperature showed a good agreement with the simulation data. Under safety standard test requirement, the normal rated current of the design micro fuses are 1.15A, 1.60A and 2.10A at an input voltage of 3.6V.

並列關鍵字

Glass Epoxy Wet Etching Micro Fuse ANSYS

參考文獻


26. 游振菖, ”探討半導體金屬化製程之金屬鉭薄膜的沉積與化學添加劑對銅沉積之影響 The Study of Magnetron Sputtering Tantalum and the Effect of Chemical Additive on Cu Electroplating”, 中原大學化學工程科學系碩士班碩士論文, 民91.
24. 邱重榮, ”電熱式微致動器疲勞實驗與分析 Fatigue Experiment and Analysis of Electro-Thermal Actuators”, 成功大學工程科學系碩士班碩士論文, 民92.
9. D. Maier-schneider, S. Kolb, B. Winkler, W. M. Werner, “Novel Surface-Micromachined Low-Power Fuses for on-Chip Calibration”, Sensors and Sctuators, A 97-98, 173-178, 2002.
11. D. W. Greve, “Programming Mechanism of Polysilicon Resistor Fuses,” IEEE Journal of Solid-state Circuits, Vol. sc-17, No. 2, Appil, 1982.
12. H. A. Schafft, “Second Breakdown- a Comprehensive Review”, Proc.IEEE, vol.55, p. 1272, 1967.

延伸閱讀


國際替代計量