本研究以溶膠凝膠法來製備B2O3-P2O5-SiO2系玻璃陶瓷粉體,實驗中主要探討不同組成的B2O3-P2O5-SiO2系玻璃陶瓷對最終獲得粉體性質之影響,而產物粉體主要是藉由DTA-TG、FT-IR、XRD、SEM、EIS等分析來作性質分析。從結果顯示,原料的硼酸、磷酸含量影響產物粉體的相態,不同的相態呈現出不同的含水導電特性。若硼酸/磷酸比大於0.8,其粉體相態以磷酸硼為主,其熱行為包含了有機物和結晶水的移除,TG曲線在500℃之後持平,其含水導電度則隨熱處理溫度上升而下降。當硼酸/磷酸比小於0.8時,相態包含了磷酸硼與磷酸矽,隨磷酸的增加而主要相態由磷酸硼變為與磷酸矽,其TG曲線在1100℃時會有一重量損失,是磷酸矽在高溫時分解所導致的現象。高磷酸含量的樣品,其含水時的導電度受熱處理溫度的影響較少,最佳的導電度值可達到1.19×10-2 (S/cm)。
B2O3-P2O5-SiO2 glass-ceramic(BPSG) powder was prepared by using sol-gel method. The resultant powder was analyzed using DTA-TG, FT-IR, XRD, SEM, and EIS. Effects of various BPSG components were studied. The H3BO3/H3PO4 ratios influence the phases and the electric properties of the obtained powder. If the H3BO3/H3PO4 ratios were more than 0.8, BPO4 was the main phase which TG curve end up in a draw at 500℃ with decreasing conductivity by increasing heat-treated temperature. On the other hand, the H3BO3/H3PO4 ratios were less than 0.8, the main phase became silicon phosphate, which TG curve had weight loss about 1100℃ caused by the decomposition reaction. The conductivity showed less dependence on heat-treated temperature. The maxium conductivity of sample with water is 1.19×10-2 (S/cm).