Title

複合氧化層於高壓閘極之應用

Translated Titles

An Application of Composite Oxideto High Voltage Gate Oxide

Authors

巫守浚

Key Words

高壓元件 ; 複合氧化層 ; 可靠度 ; high voltage device ; composite oxide ; reliability

PublicationName

中興大學材料科學與工程學系所學位論文

Volume or Term/Year and Month of Publication

2009年

Academic Degree Category

碩士

Advisor

薛富盛

Content Language

繁體中文

Chinese Abstract

近年來由於液晶電視、無線電話等大量消費性電子產品受到廣大消費者的喜愛,帶起一波波的需求。在這些產品的控制器裡面都有一顆能忍受高電壓的積體電路,本文就是討論這種高壓元件在製程世代不斷演進的過程中所面臨到可靠度不佳的問題。 我們發現在有問題的元件中,其階梯覆蓋率是普遍不佳的狀況,進而發展出複合氧化層的想法。希望在不影響元件的特性的情況下,又能對階梯覆蓋率有所改善。為了全盤瞭解問題,在實驗的過程中,首先透過量測儀器對實驗的半導體材料進行基本薄膜特性分析,而後利用不同的實驗條件經由元件的電性測試與可靠度測試,嘗試並歸納出解決問題的方向。 最後透過本實驗讓我們知道熱氧化層與化學氣相沉積薄膜所形成的複合氧化層的相關材料特性與應用在閘極氧化層時對於元件電性影響的程度,也對元件的可靠度分析提供了另外一種指標。

English Abstract

In recent years due to the liquid crystal display TV, the cellular phone etc electrical products are very popular and have a huge demand. Some can endure the high voltage in inside these product's controller the IC, this article is discusses this kind of high-voltage device to face in the system regulation generation unceasing evolution process to the reliability not good question. We discovered in the trouble device, its steps coverage is generally not good, and then develops the composite oxide layer idea. The hope does not affect in device’s electrical characteristic, can also have the improvement to the steps coverage. To overall understand the question, in experiment's process, first measure by the measuring instrument to carry on the basic thin film characteristic analysis to experiment's semiconductor material, then uses the different experimental condition by way of device's electrical test and reliability test, attempts and induces solves the question direction. Finally penetrates this experiment to let us know the composite oxide layer related materials behavior which and the application the thermal oxide layer and chemical vapor deposition film forms when the gate oxide layer regarding device electric properties influence, also has provided other one kind of index to device's reliability analysis.

Topic Category 工學院 > 材料科學與工程學系所
工程學 > 工程學總論
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