Title

電化學加工搭配單發放電製作微細球狀探針之研究

Translated Titles

A study on hybrid process of ECM and one pulse electro discharge to fabricate micro ball-ended stylus tips

Authors

蔡清富

Key Words

電化學 ; 單發放電 ; 三次元量床 ; Micro ECM ; One pulse electro discharge ; CMM

PublicationName

臺北科技大學製造科技研究所學位論文

Volume or Term/Year and Month of Publication

2014年

Academic Degree Category

碩士

Advisor

許東亞

Content Language

繁體中文

Chinese Abstract

傳統的細小球狀探針加工,主要利用WEDG方式加工微細工具後,再配合單發放電方式成形微細球探針,雖然WEDG可加工直的微細工具,但加工耗時,而且當直徑小於40μm以下時,微細工具會有歪斜現象。因此本研究利用電解加工方式,首先將鎢棒材研磨至40μm左右,再配合單發放電成形微細球狀探針。因電解加工無力學作用而且加工效率佳,故可快速成形微細電極工具,利用CCD影像輔助監測系統,並維持電極直徑之誤差值10μm以內,如此在定能量單發放電下,可成形相同球徑之微細球探針。利用ECM與OPED將可更快速,更有效率的加工Micro CMM感測探頭使用之微細球狀探針。

English Abstract

Micro spherical stylus tip plays an important role in micro coordinate measuring machine (CMM) metrology. A micro CMM needs a tiny spherical stylus tip with diameter less than 0.125mm to measure micro components such as micro slots, micro holes, and micro gears. With combination WEDG technology and one pulse electro discharge (OPED) process, micro spherical stylus tips with 60μm in diameter has been fabricated successfully. However the time consuming of a long micro electrode tool fabrication is still a critical problem by WEDG technology. In order to fabricate micro ball-ended stylus tips more efficiency, this study presents a new hybrid process with combination micro ECM and OPED to produce micro spherical stylus tips for micro CMM’s probing heads. To fabricate high quality spherical stylus tips, the parameters of micro ECM and OPED such as feeding speed, concentration of electrolyte, and pulse duration will be also investigated in this study. It is expected that micro spherical stylus for CMM’s probing heads could be fabricated more efficiency by this hybrid machining process.

Topic Category 機電學院 > 製造科技研究所
工程學 > 機械工程
Reference
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Times Cited
  1. 薛祖群(2014)。微細電極工具電化學加工之參數探討。臺北科技大學機電整合研究所學位論文。2014。1-55。