Title

藉由旋轉塗佈法製備高穩定性之p-type氧化鋅

Translated Titles

Fabrication of P-Type Li-Doped MgZnO Films by Spin-Coating

DOI

10.6843/NTHU.2014.00350

Authors

鄭博文

Key Words

p-type 氧化鋅 ; 旋轉塗布法 ; 熔膠凝膠

PublicationName

清華大學材料科學工程學系學位論文

Volume or Term/Year and Month of Publication

2014年

Academic Degree Category

碩士

Advisor

簡朝和

Content Language

繁體中文

Chinese Abstract

本實驗利用濕式化學合成的方式,將醋酸鋅、醋酸鎂及醋酸鋰溶於正丙醇中,並加入單乙醇胺作為穩定劑,於70oC、300rpm下成功製備出透明澄清之穩定LiMgZnO溶膠,再利用旋轉塗佈的方式將LiMgZnO漿料均勻鍍於玻璃基板之上。將試片置於管爐中以500oC退火兩小時,得到純相的wurtzite,於可見光範圍其穿透率均大於80%具有良好穿透率,實驗結果中當Mg=10mol%,具有最高之載子遷移率為120 cm2/Vs,再藉由添加Li,當Li=0.4mol%取代Zn可產生較高之載子濃度高達2.6*1012 cm-3,載子遷移率為130 cm2/Vs,其原因為Li取代Zn會因為缺陷化學而產生大量電洞,因此得到一低電阻率、高載子濃度且穩定之p型LiMgZnO半導體。

Topic Category 工學院 > 材料科學工程學系
工程學 > 工程學總論
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