氧化鋅奈米線指叉電極晶片進行血球阻抗量測之研究

Study on Impedimetric Measurement of Blood Cells Using ZnO-Nanowire Interdigitated Electrodes

黃義中

氧化鋅奈米線 ； 指叉電極 ； ZnO nanowires ； IDE

中原大學機械工程研究所學位論文

2016年

碩士

張耀仁

繁體中文

摘要 在本研究中，使用印刷電路板（PCB）基板作為晶片基板，利用黃光微影製程的方法將FR4銅箔基板上的銅蝕刻出指叉電極圖案，然後利用不同光阻的特性,成功的將氧化鋅奈米線選擇性地生長在指叉電極間隙內，再利用阻抗計量測紅血球之阻抗再以奈氏圖繪製曲線以達到檢測分析的目的。實驗結果表示，氧化鋅奈米線指叉電極比沒有奈米線的指叉電極更加的靈敏，氧化鋅奈米線指叉電極可將3%紅血球溶液0.2ul體積下，可量測其阻抗數據，在微量體積變化下，亦能明顯分辨出其差異，且在取樣體積不同下，體積越大所得到阻抗值越大，也顯示了紅血球的阻抗相較於其稀釋溶液為大。 以奈米線指叉電極量測紅血球溶液阻抗時，依其奈氏圖可將其模擬成一電阻與電容之等效電路，再將溶液電阻及電雙層電容量測出來，即可得出紅血球之阻抗效應。

Abstract In this thesis, a printed circuit boards (PCB) was treated as the chip substrate to allow FR4 copper foil to be patterned into copper interdigitated electrodes by photolithography process. Different types of photoresists were utilized to define the location of Zinc oxide (ZnO) nanowire selectively into the gap of copper interdigitated electrodes. Electrochemical impedance of erythrocytes was detected and analyzed via impedance meter and the recorded Nyquist plot. The results show that the electrochemical impedance spectra are distinguishable and more sensitive in comparison with those of interdigitated electrodes without ZnO nanowire. ZnO nanowire interdigitated electrodes can be exercised to detect the impedance of 3% red blood solution with a trace volume of 0.2ul. In different volume levels, the value can still be detected. The increase of probe volume provides larger impedance value which indicates the blood cells have larger impedance than the solvent. The impedance value of blood cell can be obtained from measuring with the nanowire interdigitated electrodes system. A simulated equivalent circuit of resistor(s) and capacitor(s) can be derived from the recorded Nyquist plot. Following with the measured value of solution resistance and the Electrical Double-Layer capacitance, the impedance of red blood cells can be calculated by deduction.

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