微反應晶片應用於硒化鎘奈米微粒合成之研製

DEVELPMENT OF MEMS-BASED MICROREACTOR FABRICATED FOR SYNTHESIZING COMPOSITE CdSe NANOPARTICLES

唐隆綾(Lung-Ling Tang)

指導教授 ： 楊啟榮 博士 ； 謝佑聖 博士

國立臺灣師範大學/科技學院/機電科技研究所/碩士(2004年)

摘要

奈米微粒(nanoparticles)由於粒子尺寸接近分子層級，受到強烈的量子侷限效應(quantum size confinement effect)規範，使其在各性質上顯現出截然不同於傳統塊材之特性，在眾多材料特性中，其吸收、放光光譜皆為粒子大小依憑性(size-dependent)最為顯而易見，此特性使得奈米微粒能廣泛應用於光電科技、生醫檢測方面的研究。因此近年來相關奈米微粒之製備，皆朝向高粒徑均勻度(monodispersity)、粒子大小可控性來發展。然而，透過化學藥品分散與包覆，奈米微粒的分佈寬度仍有一定極限，無法完全解決粒徑均勻度不佳之問題。
微流體系統具有快速質傳與熱傳特性的優點，應用於生化反應，如連鎖反應聚合脢(Polymerase Chain reaction, PCR)的微反應晶片，便有極優於傳統反應之表現。因此本研究目的即以微機電製程技術為基礎，製作一應用於合成硒化鎘奈米微粒之微反應晶片。與傳統巨觀反應器相較，微反應晶片因具有快速升溫降溫、溫度分佈均勻、濃度與反應時間容易控制等優點，預期能改善傳統合成法未能解決之粒徑分佈不均現象，並且精確的控制奈米粒子之粒徑大小；產量部分則藉由連續反應提升產量，達反應自動化與批次化生產的目的。本研究已建立一套製程，成功將微混合元件與微加熱元件，整合於全玻璃反應晶片上，並實際通入硒化鎘奈米微粒溶液進行合成，以驗證此微反應晶片之可行性。

關鍵字

硒化鎘奈米微粒 ； 微流體系統 ； 微反應晶片 ； 渾沌對流

並列摘要

Nanoparticles have been widely used in the fields of opto-electric and bio-inspecting technologies. The opto-electric characteristics of materials, e.g. absorbed and emitting spectrum, are significantly dependent to the size of the particles; therefore, the related techniques for preparing nanoparticle are requested to high monodispersity and controllability of particle diameters recently. However, the monodispersity of particle diameters is still a problem in present preparing techniques of nanoparticles.
Microfluidic system has the advantage of rapid mass transport and heat delivery. In this proposal, a MEMS-based microreactor chip will be developed to synthesize composite CdSe nanoparticles. This microreactor chip will integrate the functions of micro mixer, micro heater, continuous reaction. Compared with the traditional reactor, because microreactor has the merits of rapidly increasing and decreasing temperature, uniform temperature distribution, concentration and react time easily controlled, can significantly improve the drawbacks of poor monodispersity of particle diameters. Besides, the particle diameters can be precisely controlled by adjusting reaction parameters; batch production of nanoparticles will be also realized by continuous reaction and synthesis. We developed a glass deep-etching technique and integrated Pt micro heater and 3D micromixer on micro reactor devices. By using this device, CdSe nanoparticles can be produced and particle size can be adjusted by the temperature control.

並列關鍵字

CdSe nanoparticle ； micro fluidic system ； microreactor chip ； chaotic advection