本論文主要進行高分子波導非對稱結構之研究與分析,以微機電製程技術中的黃光微影製程、微接觸成型、複製成形技術,製作波導結構至高分子材料上,並用其技術將其中一條波導通道遮蔽,接著利用全像干涉微影技術製作布拉格光柵於波導底部,形成非對稱的結構。在製程中兩條導光層分別使用了不同的材料,為更進一步調整此波導元件之反射波形,在輸入/輸出側的導光層中,加入了高折射率的液晶以提高濾波的精細度。 本文研究中,會以原子力顯微鏡觀測元件中光柵的週期、深度及3D模擬圖;以場發射掃描式電子顯微鏡觀察元件的細微結構,並以近場量測技術來觀察元件的光飽和強度,最後再以寬頻光源模組元件輸出之穿透頻譜與經由光柵反射於擷取端的反射頻譜。
In this thesis, research and analysis of polymer waveguide asymmetric structure in LIGA technology in the photolithography process, the micro-contact molding, copy forming technology, making the waveguide structure to polymer materials, and use its technology to one of the waveguide channels shelter, then the use of holographic interference lithography to fabricate waveguide Bragg gratings on the bottom, forming a non-symmetrical structure. In the process, two waveguide cores are the different materials in the waveguide elements , in the input / output side of the core, the liquid crystal with high refractive index is added, to increase the fineness of the filter . In this paper, using Atomic Force Microscope to observe element’s grating cycle, depth and 3D Rendering; with Field Emission Scanning Electron Microscope to observe the fine structure elements and the near-field observation light saturation intensity, then the output of the tunable laser penetrate through the grating reflection spectrum and capture the reflection spectrum of clients.