快速氧化鋅薄膜製程於一氧化碳氣體感測元件之應用

氧化鋅(ZnO)是一種無毒性、對環境無害的材料，可應用於綠能生活中所需之設備、感測器與致動器。本研究以快速氣膠沉積法(AD)搭配二氧化碳雷射退火，製作氧化鋅多孔性薄膜作為一氧化碳氣體感測元件之氣敏材料。由實驗結果得知，氣體感測元件以180℃之操作溫度而言，於CO濃度100ppm之靈敏度為5.03%且響應時間為45秒，另於1000ppm之靈敏度為41.11%且響應時間為24秒。因此當操作溫度升高及一氧化碳濃度增加時，感測元件之靈敏度提升且響應時間減少。因此氣膠沉積法可快速製作高氣敏性氧化鋅薄膜之一氧化碳氣體感測元件，且兼具低溫高沉積速率、大面積生產及低成本之優勢。

關鍵字

一氧化碳氣體感測器；氧化鋅；氣膠沉積法；雷射退火

並列摘要

Zinc oxide (ZnO) is a low-toxicity and environmentally-friendly material applied on devices, sensors or actuators for “green” usage. A porous ZnO film deposited by a rapid process of aerosol deposition (AD) with laser annealing was employed as the gas-sensitive material in a CO gas sensor. In the results with an operating temperature of 180℃, the sensitivities of the ZnO gas sensors were about 5.03% with the response time of 45 s, and 41.11% with the response time of 24 s under CO concentrations of 100ppm and 1000ppm, respectively. Hence, the sensitivity and response time presented good performance at increasing operating temperatures and CO concentrations. The AD was successfully applied for making ZnO gas sensors with great potential for achieving high deposition rates at low deposition temperatures, large-scale production and low cost.

並列關鍵字

CO gas sensor ； Zinc oxide ； Aerosol deposition ； Laser annealing

參考文獻

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[2]National Fire Protection Association, NFPA's Fire Protection Handbook, 20th Edition.

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[6]Yu, J., Yu, X., Zhang, L., and Zeng, H., 2012, “Ammonia gas sensor based on pentacene organic field-effect transistorr”, Sensors and Actuators B, 173, pp. 133-138.

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快速氧化鋅薄膜製程於一氧化碳氣體感測元件之應用

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