Title

運用LED機台製程資料建立LED亮度與電壓預測模式

Translated Titles

Predicting LED Brightness and Voltage using LED Process Data

Authors

林慧琪

Key Words

資料探勘 ; 良率 ; LED ; Data Mining ; Yield ; LED

PublicationName

中正大學資訊管理學系學位論文

Volume or Term/Year and Month of Publication

2013年

Academic Degree Category

碩士

Advisor

胡雅涵

Content Language

繁體中文

Chinese Abstract

國內LED產業為了維持優勢,必需提升製程技術,以高良率為生產後盾,並同時兼顧新技術產品開發及降低生產成本。LED晶粒製程中有數十個互相影響的製程參數,機台參數如果沒有通過有效的工程實驗批的測試,則又必須從頭再進行一次,耗時又耗費成本。且LED晶粒製程因資料來源多樣繁雜資料收集不易,加上無法有效率的找出產品問題,造成產品停滯在產線時間過長,則使得產品達交率差,因此如何隨時掌控生產製造過程的資訊,變成企業市場競爭力提升的關鍵因素。 本研究透過MES系統收集生產批的相關資訊,首先將不同來源的資料做整合,接著使用資料前處理方式,將資料做初步處理與篩選,最後則是透過資料探勘中的類神經網路、支援向量機、迴歸分析、模式樹等分類技術,來找出最佳預測模式,其中模式樹被證實是最有效的預測技術,可以分析製程中影響亮度與電壓的有效因子,適時提供給研發、工程人員做為參考及改善依據。

English Abstract

In order to maintain the advantages of domestic LED industry, it is necessary to upgrade the manufacturing process not only to develop new product but also reduce production costs and improve yield. There are dozen variables which influence process parameters. If they are not been effectively test in engineering run first, often the whole process will have to start from scratch again. It's time-consuming and costly. The source of LED chip processing data are complex and hard to collect. Causing the low order fill rate because the product stuck on production line waiting for data processing. Thereby one of the key to improve competitiveness in the market is to manage process data at all time. This study using MES system to collect processing information. Staring from integrate information from different sources, and then use the data pre-processing method to do data initial processing and filtering. After, using techniques such as Neural Networks、Support Vector Machine、Regression Analysis and Model Tree of data mining to find the best predictive model. The Model Tree proved to be the best predictive model. Analysis and determine the process factor that affect brightness and voltage of LED chips. Provide engineering staff the data in time for process improvement.

Topic Category 管理學院 > 資訊管理學系
社會科學 > 管理學
Reference
  1. Alzghoul, A., Löfstrand, M., & Backe, B. (2012). Data stream forecasting for system fault prediction. Computers & Industrial Engineering, 62(4), 972-978. doi: 10.1016/j.cie.2011.12.023
    連結:
  2. An, H. M., Sim, J. I., Shin, K. S., Sung, Y. M., & Kim, T. G. (2012). Increased Light Extraction From Vertical GaN Light-Emitting Diodes With Ordered, Cone-Shaped Deep-Pillar Nanostructures. IEEE Journal of Quantum Electronics, 48(7), 891-896. doi: 10.1109/jqe.2012.2190587
    連結:
  3. Arora, A., Ceccagnoli, M., & Cohen, W. M. (2008). R&D and the patent premium. International Journal of Industrial Organization, 26(5), 1153-1179. doi: 10.1016/j.ijindorg.2007.11.004
    連結:
  4. Bekkers, R., Bongard, R., & Nuvolari, A. (2011). An empirical study on the determinants of essential patent claims in compatibility standards. Research Policy, 40(7), 1001-1015. doi: 10.1016/j.respol.2011.05.004
    連結:
  5. Bergeret, F., & Le Gall, C. (2003). Yield improvement using statistical analysis of process dates. IEEE Transactions on Semiconductor Manufacturing, 16(3), 535-542. doi: 10.1109/tsm.2003.815204
    連結:
  6. Bernard, K. F., Rigal, F., & Mauget, F. (2013). Mining association rules for the quality improvement of the production process. Expert Systems with Applications, 40(4), 1034-1045. doi: 10.1016/j.eswa.2012.08.039
    連結:
  7. Braha, D., & Shmilovici, A. (2002). Data mining for improving a cleaning process in the semiconductor industry. IEEE Transactions on Semiconductor Manufacturing, 15(1), 91-101. doi: 10.1109/66.983448
    連結:
  8. Breiman, L. (1996). Bagging predictors. Machine Learning, 24(2), 123-140.
    連結:
  9. Chang, P. C., Tsou, N. T., Yuan, B. J. C., & Huang, C. C. (2002). Development trends in Taiwan's opto-electronics industry. Technovation, 22(3), 161-173. doi: 10.1016/S0166-4972(01)00008-6
    連結:
  10. Chang, S. J., Chen, W. S., Lin, Y. C., Chang, C. S., Ko, T. K., Hsu, Y. P., . . . Shei, S. C. (2006). Nitride-based flip-chip LEDs with transparent Ohmic contacts and reflective mirrors. IEEE Transactions on Advanced Packaging, 29(3), 403-408. doi: 10.1109/tadvp.2006.871189
    連結:
  11. Chou, P. H., Wu, M. J., & Chen, K. K. (2010). Integrating support vector machine and genetic algorithm to implement dynamic wafer quality prediction system. Expert Systems with Applications, 37(6), 4413-4424. doi: 10.1016/j.eswa.2009.11.087
    連結:
  12. Cunningham, S. P., Spanos, C. J., & Voros, K. (1995). Semiconductor yield improvement: results and best practices. IEEE Transactions on Semiconductor Manufacturing, 8(2), 103-109. doi: 10.1109/66.382273
    連結:
  13. Dance, D., & Jarvis, R. (1992). Using yield models to accelerate learning curve progress. IEEE Transactions on Semiconductor Manufacturing, 5(1), 41-46. doi: 10.1109/66.121975
    連結:
  14. Fayyad, U., Piatetsky-Shapiro, G., & Smyth, P. (1996). The KDD process for extracting useful knowledge from volumes of data. Communications of the ACM, 39(11), 27-34. doi: 10.1145/240455.240464
    連結:
  15. Feyyad, U. M. (1996). Data mining and knowledge discovery: making sense out of data. IEEE Expert: Intelligent Systems and Their Applications, 11(5), 20-25. doi: 10.1109/64.539013
    連結:
  16. Frawley, W. J., Piatetsky-Shapiro, G., & Matheus, C. J. (1992). Knowledge discovery in databases: An overview. AI magazine, 13(3), 57-70. doi: 10.1002/int.4550070708
    連結:
  17. Freeman, J., & Skapura, D. (1991). Neural networks, algorithms, applications, and programming techniques. Boston, MA: Addison-Wesley.
    連結:
  18. Fu, Y. K., Chen, B. C., Fang, Y. H., Jiang, R. H., Lu, Y. H., Xuan, R., . . . Chang, C. Y. (2011). Study of InGaN-Based Light-Emitting Diodes on a Roughened Backside GaN Substrate by a Chemical Wet-Etching Process. IEEE Photonics Technology Letters, 23(19), 1373-1375. doi: 10.1109/lpt.2011.2161276
    連結:
  19. Gattiker, A., & Nigh, P. (2012). Guest Editors' Introduction: Yield Learning Processes and Methods. IEEE Design & Test of Computers, 29(1), 6-7. doi: 10.1109/mdt.2011.2180958
    連結:
  20. Ginarte, J. C., & Park, W. G. (1997). Determinants of patent rights: A cross-national study. Research Policy, 26(3), 283-301. doi: 10.1016/s0048-7333(97)00022-x
    連結:
  21. Gruppe, F. H., & Owrang, M. (1995). Data base mining. Information Systems Management, 12(4), 26-31. doi: 10.1080/07399019508963000
    連結:
  22. Holonyak, N., & Bevacqua, S. F. (1962). Coherent (visible) Light Emission from Ga(As1-XPx) Junctions. Applied Physics Letters, 1(4), 82-83. doi: 10.1063/1.1753706
    連結:
  23. Hsieh, K. L. (2006). Parameter optimization of a multi-response process for lead frame manufacturing by employing artificial neural networks. International Journal of Advanced Manufacturing Technology, 28(5/6), 584-591. doi: 10.1007/s00170-004-2383-1
    連結:
  24. Hsieh, Y. L., Tzeng, G. H., Lin, G. T. R., & Yu, H. C. (2010). Wafer Sort Bitmap Data Analysis Using the PCA-Based Approach for Yield Analysis and Optimization. IEEE Transactions on Semiconductor Manufacturing, 23(4), 493-502. doi: 10.1109/tsm.2010.2065510
    連結:
  25. Kayo, K., Seogwoo, L., Sung Ryong, C., Jinsub, P., Hyojong, L., Jun-Seok, H., . . . Yao, T. (2012). Improvement of Light Extraction Efficiency and Reduction of Leakage Current in GaN-Based LED Via V-Pit Formation. IEEE Photonics Technology Letters, 24(6), 449-451. doi: 10.1109/lpt.2011.2180523
    連結:
  26. Lee, H. K., Kim, M. S., & Yu, J. S. (2012). Enhanced Light Extraction of GaN-Based Green Light-Emitting Diodes With GaOOH Rods. IEEE Photonics Technology Letters, 24(4), 285-287. doi: 10.1109/lpt.2011.2177455
    連結:
  27. Lee, W. C., Wang, S. J., Uang, K. M., Chen, T. M., Kuo, D. M., Wang, P. R., & Wang, P. H. (2010). Enhanced Light Output of GaN-Based Vertical-Structured Light-Emitting Diodes With Two-Step Surface Roughening Using KrF Laser and Chemical Wet Etching. IEEE Photonics Technology Letters, 22(17), 1318-1320. doi: 10.1109/lpt.2010.2055047
    連結:
  28. Li, C. K., & Wu, Y. R. (2012). Study on the Current Spreading Effect and Light Extraction Enhancement of Vertical GaN/InGaN LEDs. IEEE Transactions on Electron Devices, 59(2), 400-407. doi: 10.1109/ted.2011.2176132
    連結:
  29. Li, D. C., Chang, C. C., & Liu, C. W. (2012). Using structure-based data transformation method to improve prediction accuracies for small data sets. Decision Support Systems, 52(3), 748-756. doi: 10.1016/j.dss.2011.11.021
    連結:
  30. Li, D. C., Chen, W. C., Liu, C. W., Chang, C. J., & Chen, C. C. (2012). Determining manufacturing parameters to suppress system variance using linear and non-linear models. Expert Systems with Applications, 39(4), 4020-4025. doi: 10.1016/j.eswa.2011.09.067
    連結:
  31. Liao, C. H., Chen, C. Y., Chen, H. S., Chen, K. Y., Chung, W. L., Chang, W. M., . . . Yang, C. C. (2011). Emission Efficiency Dependence on the p-GaN Thickness in a High-Indium InGaN/GaN Quantum-Well Light-Emitting Diode. IEEE Photonics Technology Letters, 23(23), 1757-1759. doi: 10.1109/lpt.2011.2169243
    連結:
  32. Lin, C. M., Lin, C. F., Shieh, B. C., Yu, T. Y., Chen, S. H., Tsai, P. H., . . . Tsai, T. L. (2012). InGaN-Based Light-Emitting Diodes With a Sawtooth-Shaped Sidewall on Sapphire Substrate. IEEE Photonics Technology Letters, 24(13), 1133-1135. doi: 10.1109/lpt.2012.2196511
    連結:
  33. Lin, J. S. (2012a). Constructing a yield model for integrated circuits based on a novel fuzzy variable of clustered defect pattern. Expert Systems with Applications, 39(3), 2856-2864. doi: 10.1016/j.eswa.2011.08.144
    連結:
  34. Lin, J. S. (2012b). A novel design of wafer yield model for semiconductor using a GMDH polynomial and principal component analysis. Expert Systems with Applications, 39(8), 6665-6671. doi: 10.1016/j.eswa.2011.09.146
    連結:
  35. Liou, J. K., Liu, Y. J., Chen, C. C., Chou, P. C., Hsu, W. C., & Liu, W. C. (2012). On a GaN-Based Light-Emitting Diode With an Aluminum Metal Mirror Deposited on Naturally-Textured V-Shaped Pits Grown on the p-GaN Surface. IEEE Electron Device Letters, 33(2), 227-229. doi: 10.1109/led.2011.2177806
    連結:
  36. Liu, Y. H., Lin, S. H., Hsueh, Y. L., & Lee, M. J. (2009). Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble. Expert Systems with Applications, 36(2), 1978-1998. doi: 10.1016/j.eswa.2011.09.146
    連結:
  37. Liu, Y. J., Huang, C. C., Chen, T. Y., Hsu, C. S., Liou, J. K., & Liu, W. C. (2011). Improved Performance of an InGaN-Based Light-Emitting Diode With a p-GaN/n-GaN Barrier Junction. IEEE Journal of Quantum Electronics, 47(6), 755-761. doi: 10.1109/jqe.2011.2114330
    連結:
  38. Liu, Y. J., Tsai, T. Y., Yen, C. H., Chen, L. Y., Tsai, T. H., & Liu, W. C. (2010). Characteristics of a GaN-Based Light-Emitting Diode With an Inserted p-GaN/i-InGaN Superlattice Structure. IEEE Journal of Quantum Electronics, 46(4), 492-498. doi: 10.1109/jqe.2009.2037337
    連結:
  39. Meidan, Y., Lerner, B., Rabinowitz, G., & Hassoun, M. (2011). Cycle-Time Key Factor Identification and Prediction in Semiconductor Manufacturing Using Machine Learning and Data Mining. IEEE Transactions on Semiconductor Manufacturing, 24(2), 237-248. doi: 10.1109/tsm.2011.2118775
    連結:
  40. Nakamura, S., Pearton, S., & Fasol, G. (2000). The Blue Laser Diode: The Complete Story: Berlin, Germany: Springer.
    連結:
  41. Pan, T. H., Sheng, B. Q., Wong, D. S. H., & Jang, S. S. (2011). A Virtual Metrology System for Predicting End-of-Line Electrical Properties Using a MANCOVA Model With Tools Clustering. IEEE Transactions on Industrial Informatics, 7(2), 187-195. doi: 10.1109/tii.2010.2098416
    連結:
  42. Piramuthu, S. (2008). Input data for decision trees. Expert Systems with Applications, 34(2), 1220-1226. doi: 10.1016/j.eswa.2006.12.030
    連結:
  43. Quinlan, J. R. (1992). Learning with continuous classes. Proceedings of the 5th Australian joint Conference on Artificial Intelligence, pp. 343-348.
    連結:
  44. Quinlan, J. R. (1993). Combining instance-based and model-based learning. Proceedings of the Tenth International Conference on Machine Learning, pp. 236-243.
    連結:
  45. Ryu, H. Y., & Shim, J. I. (2010). Structural Parameter Dependence of Light Extraction Efficiency in Photonic Crystal InGaN Vertical Light-Emitting Diode Structures. IEEE Journal of Quantum Electronics, 46(5), 714-720. doi: 10.1109/jqe.2009.2035933
    連結:
  46. Schubert, E. F., Gessmann, T., & Kim, J. K. (2000). Light Emitting Diodes Kirk-Othmer Encyclopedia of Chemical Technology: Hoboken, NJ: John Wiley & Sons, Inc.
    連結:
  47. Shim, H., Kim, Y., Suh, E., & Lee, H. (2004). Effects of etching depth for n-contact and current spreading layer in InGaN/GaN light emitting diodes. Semiconductor science and technology, 19(6), 774-777. doi: 10.1088/0268-1242/19/6/021
    連結:
  48. Su, Y. K., Chen, K. C., Lin, C. L., & Hsu, H. C. (2011). Enhancement in Light Extraction of GaN-Based Light-Emitting Diodes With High Reflectivity Electrodes. IEEE Photonics Technology Letters, 23(23), 1793-1795. doi: 10.1109/lpt.2011.2167605
    連結:
  49. Wang, C. H., Lin, D. W., Lee, C. Y., Tsai, M. A., Chen, G. L., Kuo, H. T., . . . Chi, G. C. (2011). Efficiency and Droop Improvement in GaN-Based High-Voltage Light-Emitting Diodes. IEEE Electron Device Letters, 32(8), 1098-1100. doi: 10.1109/led.2011.2153176
    連結:
  50. Zhang, Y., Guo, E., Li, Z., Wei, T., Li, J., Yi, X., & Wang, G. (2012). Light Extraction Efficiency Improvement by Curved GaN Sidewalls in InGaN-Based Light-Emitting Diodes. IEEE Photonics Technology Letters, 24(4), 243-245. doi: 10.1109/lpt.2011.2177251
    連結:
  51. Breiman, L., Friedman, J., Olshen, R., & Stone, C. J. (1984). Classification and Regression Trees. Belmont, CA: Wadsworth International Group.
  52. Chang, L. B., Shiue, C. C., & Jeng, M. J. (2007, Oct.). The Reflectivity enhancement of Ni/Ag/(Ti or Mo)/Au Ohmic Contact for Flip-Chip Light-Emitting Diode Applications. Paper presented at the 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, Cannizzaro, Catania, Italy. Abstract retrieved from http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=4383839&contentType=Conference+Publications&sortType%3Dasc_p_Sequence%26filter%3DAND%28p_IS_Number%3A4383795%29%26pageNumber%3D2
  53. Chen, W. C., Tseng, S. S., Hsiao, K. R., & Liu, C. C. (2004, May). A data mining projects for solving low-yield situations of semiconductor manufacturing. Paper presented at the IEEE Advanced Semiconductor Manufacturing Conference and Workshop, Boston, MS, USA. Abstract retrieved from http://ieeexplore.ieee.org/xpl/login.jsp?tp=&arnumber=1309550&url=http%3A%2F%2Fieeexplore.ieee.org%2Fxpls%2Fabs_all.jsp%3Farnumber%3D1309550
  54. Cortes, C., & Vapnik, V. (1995). Support-vector networks. Machine Learning, 20(3), 273-297. doi: 10.1007/bf00994018
  55. Erb, H. P., Burmer, C., & Leininger, A. (2005, April). Yield enhancement through fast statistical scan test analysis for digital logic. Paper presented at the IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Munich, Germany. Abstract retrieved from http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1438804&contentType=Conference+Publications&pageNumber%3D2%26queryText%3DAdvanced+Semiconductor+Manufacturing+Conference+And+Workshop%2C+2005+IEEE%2FSEMI
  56. Kleissner, C. (1998, Jan). Data mining for the enterprise. Paper presented at the Thirty-First Hawaii International Conference on System Sciences, Kohala Coast, HI. Abstract retrieved from http://ieeexplore.ieee.org/xpl/login.jsp?tp=&arnumber=649224&url=http%3A%2F%2Fieeexplore.ieee.org%2Fxpls%2Fabs_all.jsp%3Farnumber%3D649224
  57. Linoff, G. S., & Berry, M. J. (2011). Data mining techniques: for marketing, sales, and customer relationship management: New York, NY: Wiley Computer Publishing.
  58. Mitchell, T. M. (1997). Machine learning. Boston, MA:McGraw-Hill.
  59. Raghavan, V. (2002, Aug). Application of decision trees for integrated circuit yield improvement. Paper presented at the IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Boston, MA. Abstract retrieved from http://ieeexplore.ieee.org/xpl/articleDetails.jsp;jsessionid=QC28PF0FSXtWb2DQ3YLjyT2pF4LGqT45JJWVdd1RCJThhVMtDxxH!-946354316?arnumber=1001615&contentType=Conference+Publications
  60. Roiger, R., & Geatz, M. (2003). Data mining: A tutorial-based primer. Boston, MA: Addison-Wesley.
  61. Schubert, E. F. (2006). Light-Emitting Diodes. New York, NY: Cambridge University Press.
  62. Tan, P. N., Steinbach, M., & Kumar, V. (2008). Introduction to Data Mining: London, Ireland: Pearson Addison-Wesley.
  63. Wang, Y., & Witten, I. H. (1997). Inducing model trees for continuous classes. Proceedings of the 9th European Conference on Machine Learning, pp. 128-137.
  64. Wipiejewski, T., Moriarty, T., Hung, V., Doyle, P., Duggan, G., Barrow, D., . . . Lambkin, J. D. (2008, Sept). Gigabits in the home with plugless plastic optical fiber (POF) interconnects. Proceedings of the Electronics System-Integration Technology Conference, pp. 1263-1266. doi: 10.1109/estc.2008.4684535
  65. Wong, A. Y. (1997, Oct). A statistical approach to identify semiconductor process equipment related yield problems. Proceedings of the IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems, pp. 69-73. doi: 10.1109/dftvs.1997.628311
  66. Zinke, K., Nasr, M. B., Hicks, A., Crawford, M., & Zawrotny, R. (1997, Sept). Yield enhancement techniques using neural network pattern detection. Paper presented at the IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Cambridge, MA. Abstract retrieved from http://ieeexplore.ieee.org/xpl/articleDetails.jsp;jsessionid=28lPPPTLhqQ41FqNF8sNLlf4zCp1qmFyvsSd0842pBJsCvLJKQt2!54622655?arnumber=630737&contentType=Conference+Publications