Title

利用導膜共振效應之局部強場特性引發雙光子光聚合效應

Authors

林育暄

Key Words

導模共振效應 ; 雙光子光聚合效應 ; Two photon absorption ; Guiding mode resonance

PublicationName

中正大學物理學系學位論文

Volume or Term/Year and Month of Publication

2014年

Academic Degree Category

碩士

Advisor

許佳振

Content Language

繁體中文

Chinese Abstract

本論文發展出藉由一維導模共振光柵結構(Resonance waveguide grating,RWG)之局部強場特性,RWG 的結構主要組成為: 低射率光柵,覆蓋上高折射率材料TiO2 形成波導-光柵層。將RWG 設計具有近紅外光波段(波長為1064 nm)的導模共振模態(Guided-mode resonance, GMR)特性,藉由嚴格耦合波理論(Rigorous Coupled WaveAnalysis,RCWA)計算分析,顯示此GMR 會在TiO2 波導層與空氣介面 形局部強場特性(strong local field)。使用nano-second Nd;YAG 雷射(1064 nm)為曝光光源來引發SU8 光阻的TPA 光聚合化效應;在無 RWG 結構下,所需要的臨界光強度為530 MW/cm2,而在RWG 結構的GMR 共振條件下, 其所需的光強度可以大大地被降低至 0.7MW/cm2。由於局部強場的效應關係,我們成功地製作出微奈米結構(小於100nm)。

Topic Category 基礎與應用科學 > 物理
理學院 > 物理學系
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