電阻式氧化銦錫氨氣感測器之製備與感測特性之研究

Fabrication and Sensing Characteristics of Resistance-Type Indium-Tin-Oxide (ITO) Ammonia Gas Sensors

胡舜皓(Shun-Hao Hu)

指導教授 ： 林坤緯

朝陽科技大學/資訊學院/資訊工程系/碩士(2014年)

摘要

近年來已經有許多不同類型的氣體感測器被開發及研究。而半導體感測器具成本低、體積小以及感測靈敏度高等優點被廣泛運用。本論文已經成功在氧化銦錫(Indium Tin Oxide，簡稱ITO)基板上製作多種處理方式之電阻式氨氣感測器。實驗中以SEM、AFM以及XRD分析不同處理方式對感測元件表面的影響。文獻中指出在氧化銦錫上製作之氨氣感測器經過溫度及濕度處理後，氧化銦錫表面會形成類似奈米棒之形態，可增加感測表面積和體積比，有效提高感測靈敏度。本研究中以此概念為基礎，並以氧化銦錫表面下有無金奈米層之感測器進一步探討氧化銦錫表面粗糙度對感測特性的影響。由實驗中得知，氧化銦錫透明基板下蒸鍍金奈米層可提高感測靈敏度，感測氨氣濃度在150℃氨氣感測濃度可達20ppb。
為了更進一步分析氨氣感測特性，我們以an ITO-based ammonia sensor的暫態響應為資料來源，利用一階微分概念分析在不同操作溫度以及不同氨氣濃度時感測界面空缺狀況。
在感測傳輸的運用上，因為感測資料相當龐大，因此去除冗餘資料是相當重要的課題。本研究以一階微分演算法去除超過95%的冗餘感測資料，達到減點傳輸的目的。

關鍵字

一階微分 ； 氧化铟锡 ； 氨氣感測器 ； 冗餘資料

並列摘要

Recently, many different types of gas sensors have been developed and studied. Semiconductor sensors with the advantages of low cost, small size and high sensitivity sensing are widely used. We have successfully fabricated resistive ammonia gas sensors on ITO thin film with differential treatments. The SEM images, AFM images and XRD images were used to analyze the surface morphology of the studied devices.
The literature indicates that the surface morphology is similar to the nanorods for ammonia gas sensor fabricated on indium tin oxide (ITO) after the temperature-humidity treatment. This will caused the enhancement of surface-to-volume ratio under more grain boundaries. Based on this concept, the studied devices were treated with temperature-humidity. In this study, the ammonia gas sensors based on ITO thin film with or without underlying Au-naodot have been investigated. From the experimental results, the ammonia gas sensors based on ITO thin film underlying Au-naodot layer can improve its ammonia detecting capability. The ammonia detecting capability can reach to 20ppb NH3 at 150℃.
In order to further understand the ammonia sensing characteristics, the transient response data of an ITO-based ammonia sensor are used to analyze. The first-order differential concept was used to analyze the situation of interface vacancy. In the practical application of sensing transmission, how to remove redundant data is a very important issue. In this study, the first differential algorithm was developed to remove over 95% redundancy of the sensing data. Our studied algorithm can reach the goal of reduce the transmission data.

並列關鍵字

First-Order differential algorithm ； Indium-Tin-Oxide ； Ammonia sensors ； Redundant data

參考文獻

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