環境微振動標準與高感度加速規在低頻微振動下的選用及量測

The Standard of Environmental micro-vibration and the Selection and Measurement of High Sensitivity Accelerometer under Low Frequency and Low Amplitude Vibration

黃宇中(Yeu-Jong Huang) ； 陳興(Shing Chen)

《中華民國振動與噪音工程學會論文集》 1998 (1998/05) Pp. 99-102

https://doi.org/10.30028/CSSVANNUAL.199805.0099

摘要

本文主要是介紹低頻低振幅的環境振動，這種微振動(micro-vibration)對買驗室或半導體製程，檢測都有一定的影響，因此彙整出一般環境微振動的規格標準；另一方面普通的加速規感測器並無法真實反應出低頻低振幅的振動。因此如何選擇一個適當的高感度加速規是一件重要事情，只要儀器本身的雜訊(noise)高於外來振動就無法量測，其雜訊須小於量測值的1/10方有意義。最後提及國家標準實驗室(NML)。振動／聲量室目前已建立低頻加速規校正系統。量測所使用的感測器皆有標準的追溯源，因此加速規測試之數據才具有可信度。

並列摘要

The low frequency and low amplitude environmental micro-vibration measurement will be described in this paper. They have certain influences on vibration measurement or process of semiconductor manufacturing. We collect some standards of environmental micro-vibration specification. The general accelerometer can not respond the low frequency and low amplitude vibration truly, so the selection of adequate and high sensitivity accelerometer is very important. If the noise of the instrument is higher than the vibration signal, the measurement will be failed. The noise must be 1/10 value of the measurement for a good measurement. Finally we mention the Vibration & Acoustics Laboratory of the National Measurement Laboratory has built the low frequency calibration system. The measurement data arc reliable since all of the sensors and instruments satisfy the traceability.