- 期刊
微型光學讀取頭之元件
Optical Element on SiN Membrane for Micro Optical Pickup Head
並列摘要
A micro optical pickup head is designed and fabricated, using the Optical MEMS technology. Its optical components, such as grating, hologram optical element (HOE) and Fresnel lens, are made on the low stress SiN membrane, has been designed on stacked Si substrates. Its advantages include the high transmission, light weight, and easy packaging.
被引用紀錄
蕭旭良（2008）。運用於光學連結模組之矽基光學平台技術〔碩士論文，國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-0207200917355330
張彥中（2011）。具三維光路之光連接發射端模組〔碩士論文，國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-1903201314413734
李建霖（2011）。非共平面雙波導光路之光連接模組〔碩士論文，國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-1903201314431350
洪真一（2015）。懸臂式聲波應力感測結構整合至具三維波導光路之矽光學平台〔碩士論文，國立中央大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0031-0412201512064462
延伸閱讀
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