具連續作業等候時間限制之平行多機生產系統控制

潘柏辰

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具連續作業等候時間限制之平行多機生產系統控制

Production Control in Parallel Multi-tool Systems under Sequential Process Queue Time Constraints

潘柏辰 , Masters　　Advisor：吳政鴻　　

繁體中文

馬可夫決策過程；動態規劃；作業等候時間限制；啟發式演算法； Markov decision process ； Dynamic programming ； Process queue time constraints ； Heuristic

Abstract │ Reference (53) │ Times Cited (2) │ Altmetrics

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Production control in parallel multi-tool systems under sequential process queue time constraints is studied in this research. When WIP finished an upstream process step, the WIP should be processed at the next process step within a given amount of time. The time constraint is called the process queue time constraint. Any violation of the process queue time constraint seriously impacts yield quality and incurs significant scrap costs. 
In the semiconductor industry, the violation of process queue time constraint may cause the wafer surface oxidation to be reproduced or scrapped. Under the sequential process queue time constraints and multi-tool production environment, the dispatching strategy is hard to be defined. Besides, machine reliability and demand uncertainties also make the production control difficult, production managers need to balance the need for achieving production targets and yield quality. 
The Multi-step with Multi-tool Heuristic Control (MMHC) is developed to minimize long-run average production cost. The MMHC strategy is formulated with stochastic dynamic programming. The model objective is to minimize the sum of inventory holding costs and scrap costs. The simulation results reveal that our method significantly reduces total production costs.

Reference ( 53 ) 〈TOP〉

[1]Akcalt, E., Nemoto, K., & Uzsoy, R. (2001). Cycle-time improvements for photolithography process in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 14(1), 48-56.
連結：
[2]Akkerman, R., Van Donk, D. P., & Gaalman, G. (2007). Influence of capacity-and time-constrained intermediate storage in two-stage food production systems. International Journal of Production Research, 45(13), 2955-2973.
連結：
[3]Archibald, T., Black, D., & Glazebrook, K. (2009). An index heuristic for transshipment decisions in multi-location inventory systems based on a pairwise decomposition. European Journal of Operational Research, 192(1), 69-78.
連結：
[4]Ayesta, U., Jacko, P., & Novak, V. (2011). A nearly-optimal index rule for scheduling of users with abandonment. INFOCOM, Proceedings IEEE.
連結：
[5]Bautista, J., & Pereira, J. (2009). A dynamic programming based heuristic for the assembly line balancing problem. European Journal of Operational Research, 194(3), 787-794.
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