適用於質量感測之基於調諧質量阻尼器結構CMOS-MEMS模態局部化共振器

A CMOS-MEMS Mode-Localized Resonator Based on a Tuned-Mass-Damper Structure for Mass Sensing Applications

杜文睿(Wun-Ruei Du)

指導教授 ： 李尉彰

國立臺灣大學/工學院/應用力學研究所/碩士(2019年)

https://doi.org/10.6342/NTU201902954

摘要

本論文利用0.35-μm CMOS-MEMS製程平台，設計並製作適用於質量感測器之模態局部化共振器，此共振器以兩端固定樑為主體，在其上方加上懸臂樑組成調諧質量阻尼器(tuned mass damper)結構，此非對稱耦合方式可達到模態局部化(mode-localization)效果，在些微質量擾動下，模態局部化共振器相較於單一共振器系統具有較大的靈敏度，可作為質量感測器之應用。
模態局部化共振質量感測器之量測機制，除如傳統單一共振器之頻率變化外，亦可由各模態振幅變化來得知質量擾動大小。本研究建立數學模型，描述感測器上質量的變化對於頻率響應曲線之影響，由特徵值解析解、有限元素模擬分析以及狀態空間系統方法，計算出系統方程式解，探討頻率以及振幅等可量測之物理量與懸臂樑擺放位置、數量及長度間的相關性。
實驗驗證方面，首先以改變懸臂樑長度，驗證出預測數學模型的準確度。並以雷射切割方式，減少懸臂樑質量作為量化質量的方法，透過掃描式電子顯微鏡(Scanning Electron Microscope, SEM)方式量測得知移除實際質量，再由頻率響應訊號計算出預測質量，比較誤差驗證預測模型。最後以燒香方式沾附煙灰於感測器上，利用頻率及振幅變化量測煙灰造成的質量改變，驗證此結構比起單一兩端固定樑有較高的靈敏度。

關鍵字

CMOS-MEMS ； 兩端固定樑式共振器 ； 質量感測器 ； 模態局部化 ； 靈敏度提高 ； 頻率感測

並列摘要

In this research, CMOS-MEMS 0.35-μm process platform is used to design the mode-localized resonator as a mass sensor. This research also uses the tuned mass damper design to couple a doubly clamped beam resonator and a cantilever resonator. The mode-coupling achieves mode-localization which has greater sensitivity than a single resonator as the application of mass sensors.
The component sensing quality method is to measure the mass variation of the resonant frequency shift and the amplitude change in frequency response. This research also establishes a mathematical model to describe the change in mass with the eigenvalue analytical solution, the finite element simulation analysis, and the state space system method. The purpose is to investigate the measurable physical quantities such as frequency shifting and amplitude change, discuss the relation of frequency and amplitude with the cantilever position, numbers, and length design.
In this research, the reliability of the predicted mathematical model was verified by measuring the frequency response of different lengths of cantilever beams. As a quantification method is to reduce mass from cantilever tips by laser cutting. This method provides a way to measure the removed mass by Scanning Electron Microscope (SEM), and the measurement results are compared with the error of the simulation results. Finally, the experiment method uses incense smoke on the mass sensor to increase the tiny mass to verify the mode-localized beam has higher sensitivity than the doubly clamped beam.

並列關鍵字

CMOS-MEMS ； Doubly Clamped Beam Resonators ； Mass Sensors ； Mode-Localization ； Sensitivity Enhancement ； Frequency Sensing

參考文獻

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