適用於質量感測之基於調諧質量阻尼器結構CMOS-MEMS模態局部化共振器

杜文睿

doi:10.6342/NTU201902954

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適用於質量感測之基於調諧質量阻尼器結構CMOS-MEMS模態局部化共振器

A CMOS-MEMS Mode-Localized Resonator Based on a Tuned-Mass-Damper Structure for Mass Sensing Applications

杜文睿 , Masters　　Advisor：李尉彰　　

繁體中文 DOI： 10.6342/NTU201902954

CMOS-MEMS ；兩端固定樑式共振器；質量感測器；模態局部化；靈敏度提高；頻率感測； CMOS-MEMS ； Doubly Clamped Beam Resonators ； Mass Sensors ； Mode-Localization ； Sensitivity Enhancement ； Frequency Sensing

Abstract │ Reference (23) │ Altmetrics

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In this research, CMOS-MEMS 0.35-μm process platform is used to design the mode-localized resonator as a mass sensor. This research also uses the tuned mass damper design to couple a doubly clamped beam resonator and a cantilever resonator. The mode-coupling achieves mode-localization which has greater sensitivity than a single resonator as the application of mass sensors.
The component sensing quality method is to measure the mass variation of the resonant frequency shift and the amplitude change in frequency response. This research also establishes a mathematical model to describe the change in mass with the eigenvalue analytical solution, the finite element simulation analysis, and the state space system method. The purpose is to investigate the measurable physical quantities such as frequency shifting and amplitude change, discuss the relation of frequency and amplitude with the cantilever position, numbers, and length design.
In this research, the reliability of the predicted mathematical model was verified by measuring the frequency response of different lengths of cantilever beams. As a quantification method is to reduce mass from cantilever tips by laser cutting. This method provides a way to measure the removed mass by Scanning Electron Microscope (SEM), and the measurement results are compared with the error of the simulation results. Finally, the experiment method uses incense smoke on the mass sensor to increase the tiny mass to verify the mode-localized beam has higher sensitivity than the doubly clamped beam.

Reference ( 23 ) 〈TOP〉

[1] K. S., T. Ono and M. Esashi, "Mass Detection using Capacitive Resonant Silicon Sensor," in SENSORS, 2006 IEEE, Daegu, 2006, pp. 1285-1288.
[2] V. Agache, M. Cochet, R. Blanc, F. Baleras and P. Caillat, "High Q factor plate resonators for ultrasensitive mass sensing applications," TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, pp. 1630-1633, Oct. 2009.
[3] H. Sone, F. Yoshinori and S. Hosaka, "Picogram Mass Sensor Using Resonance Frequency Shift of Cantilever," Japanese Journal of Applied Physics, pp. 3648-3651, June 2004.
[4] T. Ono and M. Esashi, "Mass sensing with resonating ultra-thin silicon beams detected by a double-beam laser Doppler vibrometer," Measurement Science and Technology, Volume 15, Issue 10, pp. 1977-1981, Oct. 2004.
[5] D. Nardi, E. Zagato, G. Ferrini, C. Giannetti 且 F. Banfi, “Design of a surface acoustic wave mass sensor in the 100 GHz range,” Applied Physics Letters, vol. 100, 19 June 2012.

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