陽極氧化鋁基材製程改善及其應用於固態超級電容器之研究

Improvement of Anodized Aluminum Oxide Process and Application in Solid-state Supercapacitor

劉林益(Lin-Yi Liu)

指導教授 ： 楊申語

國立臺灣大學/工學院/機械工程學研究所/碩士(2014年)

https://doi.org/10.6342/NTU.2014.01134

摘要

奈米結構的製作大多使用電子束、反應離子蝕刻等高能量束直寫達到次微米結構之製作，但設備、環境與人員操作的技術都高，且不容易做大面積奈米結構；陽極氧化鋁(anodic aluminum oxide, AAO)，簡單製程可以大面積製作奈米結構，十分適合工業運用。
本研究將純度99.999 %( 5N )與99.5 %( 2N )以及工業用1050和5052規格之鋁片經Multi-step不同電解液陽極氧化製程，得到陽極氧化鋁，第一次陽極處理使用草酸作為電解液，第二次以後陽極處理則改用磷酸作為電解液，透過不同的電解液所製作出來的陽極氧化鋁，奈米孔具週期性且規則排列。本研究接著以AAO鋁片做母模，將奈米結構製作於聚碳酸酯薄膜(PC film)表面，並透過田口法找出氣體輔助熱壓製程最佳參數。
接著使用此具奈米結構之PC薄膜作為基材，以TiO2為電極材料層，搭配固態電解質( PVA –Phosphoric acid ) 製作出具可撓性的超級電容。為驗證本實驗所製作出可撓性的超級電容的性能，進行循環伏安法量測。在掃描速率100 mV/s，無結構的超級電容比電容值為0.0075 μF/cm2 ( 0.00392 mF/g )，而三種有奈米柱結構的超級電容比電容值為0.0099 μF/cm2 ( 0.0117 mF/g )、0.11 μF/cm2 ( 0.12 mF/g )與0.148 μF/cm2 ( 0.198 mF/g )，證實奈米結構大幅提升製作可撓性的超級電容之性能。

關鍵字

陽極氧化鋁 ； 氣體輔助成型 ； 可撓性 ； 固態電解質 ； 超級電容

並列摘要

Most nanostructures are fabricated using electron beam (E-Beam), reactive ion etching (RIE) with high-energy beam direct write lithography to achieve the production of sub-micron structures. The high cost and long processing time prevent the application of nanostructures in industry. Anodized Aluminum Oxide(AAO) can provide large-area ordered nano-pores at relatively low cost.
This study first attempts to improve the process. There are 2 type substrates used. One is aluminum of high purity : 99.999%(5N) and 99.5%(2N). The other is standard aluminum 1050 and 5052 that are used in the industry. Conventional AAO used the same electrolyte for the first and second anodizations. In this study, different electrolytes are used: 0.3M oxalic acid in the first anodization and 0.1M phosphoric acid in the second (and third) anodization . This different solution treatment has better arrangement than the conventional two-step process using the same electrolyte. Furthermore, by using Taguchi method, we optimize the gas-assisted hot embossing process for fabrication of the best nano-pillar on PC films. This nanostructures produced in polycarbonate film (PC film) surface can reduce the reflectivity to 0.99 %.
A solid-state supercapacitors using PC film of nanostructures as electrodes for TiO2 nanoparticle was made. The specific capacitance of the supercapacitors with the best nanopillar structures as electrode is 0.148 μF/cm2 ( 0.198 mF/g )﹐while that without nanostructures is 0.0075 μF/cm2 ( 0.00392 mF/g ). This study proves the potential of using AAO nanostructures for enhancing the capacitance of solid-state supercapacitors.

並列關鍵字

Anodized Aluminum Oxide(AAO) ； gas-assisted molding ； Supercapacitor

參考文獻

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