微型離心式加速度開關之設計與研製

劉黃升

doi:10.6342/NTU.2012.01712

44.192.94.86，Hello！

Close
Search Quick Search Advanced Search Publication Search	Personal Service Member Login Searching History Use Bonus Card SYMSKAN
Browse Browse by University of Graduate Thesis Browse by Pinyin of Graduate Thesis Browse by Conference Proceedings Topic Browse by Conference Proceedings Publisher Browse by Pinyin of Conference Proceedings Browse by eBook Category Browse by eBook Topic Browse by eBook Publisher
Customer Services Authorize Airiti Recommend a Journal

Search Symbol (Half-width)	Description of Search Symbols
Space	"AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " )	Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" ： " image process "
?	Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
*	Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )
AND、OR、NOT	Boolean logic combinations of key words is a skill used to expand or refine search parameters. (1) AND (1) AND: Refines search parameters (2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters

DOI stands for Digital Object Identifier （ D igital O bject I dentifier ） ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「http://dx.doi.org/」「 http://dx.doi.org/ 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: http://dx.doi.org/ 10.5297/ser.1201.002 。
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI Registration （ doi.airiti.com ）。

Data Source

Basic & Applied Sciences > Physics
College of Engineering > Graduate Institute of Applied Mechanics

Bibliography Management Tool

Related Links

Report an Issue

Purchase Single Articles

Download PDF

微型離心式加速度開關之設計與研製

Design and Fabrication of Micro Centrifugal G-switch

劉黃升 , Masters　　Advisor：翁宗賢　　

繁體中文 DOI： 10.6342/NTU.2012.01712

加速度開關；離心加速度；衝擊模擬；微機電製程；釋放機構； acceleration switch ； centrifugal acceleration ； impact simulation ； MEMS process ； release mechanism

Abstract │ Reference (16) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

This thesis presents design and fabrication of a micro centrifugal G-switch by ANSYS/LS-DYNA and micro-electrical-mechanical system processing techniques. As the acceleration switch, also called the G-switch, subjected to sufficient levels of axial and centrifugal accelerations, the switch will turn from off to on, delivering signals to the connect circuits which can initiate subsequent processes.
As the G-switch receives acceleration exceeding threshold from surroundings, the proof-mass in the G-switch experiences an inertial force which moves the contact components in touch to trigger output signals. To appropriately investigate the micro centrifugal G-switch, this thesis first designed suitable accelerators and latching mechanism, then simulated numerically the dynamic response of the G-switch subjected to applied impact conditions. As the projectile rotated with a centrifugal acceleration below 1,000 rpm, the installed G-switch was not turned on, staying in a safety mode. The device would be latched up as the spin rate above 2,000 rpm. An additionally axial acceleration impact of 1000G was also applied to the centrifugal G-switch to emulate the launching situation. Numerical results of dynamic response and stress distribution were revealed to evaluate the performances of accelerometers. A novel design of latching mechanism with releasing components was figured out.
Based on the simulated numerical results, this thesis fabricated the micro centrifugal G-switch chips on a silicon-on-insulator (SOI) wafer via MEMS processing. Upon finishing the manufacturing processes, G-switch chips were tested by a centrifugal machine to investigate the performances of the fabricated devices. Test results show that the designed G-switch functioned properly as the acceleration reached the threshold, and all components of the G-switch were in the elastic region of the silicon without destruction. Heating the release mechanisms by applying 1 voltage DC source regulated with series resistors, this latched state was successfully discharged in a short time, fulfilling the purpose of reusing the G-switch.

Reference ( 16 ) 〈TOP〉

[1] P.L. Chen, R.S. Muller, and A.P. Andrews, Integrated silicon PI-FET accelerometer with proof mass, Sensors and Actuators, 5 119-126, 1984.
連結：
[2] P.W. Barth, F. Pourahmadi, R. Mayer, J. Poydock, K. Petersen, A monolithic silicon accelerometer with integral air damping and overrange protection, IEEE TH0215-4 35, 1988.
連結：
[3] F. Rudolf, A micromechanical capacitive accelerometer with a two-point inertial-mass suspension, Sensors and Actuators, 4 191-198, 1983.
連結：
[7] Z.Y. Guo, Z.C. Yang, L.T. Lin, Q.C. Zhao, H.T. Ding, X.S. Liu, X.Z. Chi, J. Cui, G.Z. Yan, A latching acceleration switch with cylindrical contacts independent to the proof-mass, IEEE SENSORS 2009 Conference, pp. 1282-5. Also, Sensors and Actuators A: Physics. 2010.
連結：
[11] 劉孟杰，離心加速度開關之設計與模擬，國立台灣大學，碩士論文，民國100年7月
連結：

Altmetrics

〈TOP〉

E-mail ：

When an article is available to download, a notice will be sent to your mailbox address.

E-mail ：