基於CMOS-MEMS 共振式開關之無線電喚醒接收機

吳典諺

doi:10.6342/NTU202203815

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College of Engineering > Graduate Institute of Applied Mechanics

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基於CMOS-MEMS 共振式開關之無線電喚醒接收機

A CMOS-MEMS Resoswitch-Based Wake-up Receiver

吳典諺 , Masters　　Advisor：李尉彰　　

繁體中文 DOI： 10.6342/NTU202203815

RF-MEMS ；喚醒接收器；訊號接收器；共振開關；低功耗； RF-MEMS ； wake-up receiver ； communication receiver ； resoswitches ； low power consumption

Abstract │ Reference (27)

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

This thesis presents a wake-up receiver system with near zero standby power con-sumption, through MEMS resoswitch-embedded receiver frontend and the low power consumption of CMOS logic gate. The chip fabrication was supported by Taiwan Sem-iconductor Research Institute (TSRI) and realized on a 0.35-μm 2poly-4-metal CMOS-MEMS platform. The post-fabrication and test are executed at NEMS Research Center at NTU such as the post-metal-release process and the probe-type surface analy-sis. Since the resoswitch-embedded communication frontend uses the resonance nature to make the structure impact the output electrode end and short circuit, the open circuit when no resonance occurs, so there is no current consumption, exhibited the advantage of near-zero standby power consumption.
The resoswitch applying OOK demodulated input signal, combined with the back-end envelope detector and digital detector for signal processing. Input the demod-ulated digital bits "0" and "1" into the correlator circuit to compare with the codebook with the CMOS logic circuit. It has the advantages of high input impedance, low power consumption, and strong anti-interference ability. Only rely on the gate voltage to con-trol the circuit operation, with no current consumption during data transmission. The av-erage power consumption of the resoswitch-embedded communication frontend that completes the demodulation work in the active mode is only 4.81 μW, and the average power consumption for completing the comparison between the input signal and the codebook and outputting a wake-up signal is only 0.743 μW.

Reference ( 27 ) 〈TOP〉

[1] P. Jörke and C. Wietfeld, "How green networking may harm your IoT network: Impact of transmit power reduction at night on NB-IoT performance," in 2021 IEEE 7th World Forum on Internet of Things (WF-IoT), 2021: IEEE, pp. 753-758.
[2] N. Tamura and H. Yomo, "Wake-up control adapting to destination's active/sleep state for on-demand wireless sensor networks," in 2018 IEEE 87th Vehicular Technology Conference (VTC Spring), 2018: IEEE, pp. 1-5.
[3] Y. Lee and J. Nolan, "Low frequency bidirectional communication transponder for security and automotive applications," in Proceedings of the 2005 European Conference on Circuit Theory and Design, 2005., 2005, vol. 2: IEEE, pp. II/185-II/188 vol. 2.
[4] J. J. Bernstein et al., "Resonant acoustic MEMS wake-up switch," Journal of Microelectromechanical Systems, vol. 27, no. 4, pp. 625-634, 2018.
[5] H. Sedaghat-Pisheh and G. M. Rebeiz, "Variable spring constant, high contact force RF MEMS switch," in 2010 IEEE MTT-S International Microwave Symposium, 2010: IEEE, pp. 304-307.

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