非線性對微機械共振式開關穩定性影響之研究

蔡淳樸

doi:10.6342/NTU201900685

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非線性對微機械共振式開關穩定性影響之研究

A Study on the Influence of Nonlinearity on Stability of Micromechanical Resoswitches

蔡淳樸 , Masters　　Advisor：李尉彰　　

繁體中文 DOI： 10.6342/NTU201900685

互補式金屬氧化物半導體-微機電系統；非線性；艾倫偏差；共振式開關；頻率穩定性；鎖相迴路； Allan deviation ； CMOS-MEMS ； Frequency stability ； Nonlinearities ； Phase locked loop ； Resonant switches

Abstract │ Reference (94) │ Altmetrics

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This thesis presents characterizations of the frequency stability of micromechan-ical clamped-clamped beam resonators operated under nonlinear tapping mode. Unlike traditional operation of MEMS resonators, which prefers linear operation for better frequency stability, nonlinear operation, as recently being demonstrated in several ap-plications, could in fact improve the frequency stability in some circumstances. This work extends the topic further by investigating MEMS resonators under highly non-linear tapping mode—that essentially perform as resonant switches, i.e., resoswitch-es.The resoswitches used in this work are manufactured by both CMOS-MEMS fabri-cation process and in-house developed SOI process. In general, a resoswitch consists of the capacitively driven input scheme, the core vibrating structure, and the output stop-per configuration. The resonant system operates in a combined electrical and mechan-ical nonlinear state, resulting in four bifurcation point in the frequency transmission response. From the classical point of view, although higher driving force yields higher Signal-to-Noise Ratio (SNR), which is helpful to enhance the precision of signal, the higher driving force also induces nonlinearity and increases the up-conversion phase/frequency noise. However, nonlinearities change the frequency-response curves and therefore some specific operation points—bifurcation point (so-called jump point)—would exhibit lower phase noise. Recently, the short-term stability has been shown to improve due to reduced amplitude-frequency conversion (A-f effect) and phase-frequency conversion at these points . Several frequency stability characteriza-tions of both electrical and mechanical nonlinearities in MEMS devices have also been studied previously. Differing from previously reported stability characterization of nonlinear MEMS devices, this work provides the first time experimental study of fre-quency stability on micromechanical resoswitches. The measurement results show that (1) two out of the four bifurcation points (i.e. top mechanical and electrical bifurcation point) performs lower short-term Allan deviation values—2× improvement has been achieved for a driving voltage of 0.5 V compared to 1.6 V; (2) the nonlinearity due to tapping operation depends on the driving voltage, gap distance, and contact material properties, providing other design parameters that might be helpful for the phase noise reduction/resolution enhancement in the relevant applications. Finally, this thesis dis-cusses some imperfections, especially in the measurement set-up such as high level input referred noise, DC polarization voltage noise and low frequency noise generated by commercially TIA, that need to be fixed as a future work. In addition, the work can be further extended for more driving conditions on the influence of nonlinearity on stability and for the stability at other bifurcation points.

Reference ( 94 ) 〈TOP〉

[1]"PRESS RELEASES GALLERY - MEMS & SENSORS," YOLE, [Online]. Available: http://www.yole.fr/2014-galery-MEMS.aspx#I0002f78f. [Accessed 30 July 2019].
[2]R. Liu, N. Nilchi, Y. Lin, T. Naing and C.-T.-C. Nguyen, "Zero quiescent power VLF mechanical communication receiver," in 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, 2015.
[3]R. Lin, J. N. Nilchi, W.-C. Li and C. T.-C. Nguyen, "Soft-impacting micromechanical resoswitch zero-quiescent power AM receiver," in IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, 2016.
[4]R. Liu, "CW-powered squegging micromechanical clock generator," in IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, 2017, pp. 905-908.
[5]S.-C. Lu, W.-R. Du, Y.-C. Huang, C.-P. Tsai and W.-C. Li, "MEMS surface coating condition monitoring via nonlinear tapping of resoswitches," in IEEE International Frequency Control Symposium (IFCS), 2018.

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