基於輪廓圖方法之微機電慣性感測器最佳化設計

劉士元

doi:10.6342/NTU202101913

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基於輪廓圖方法之微機電慣性感測器最佳化設計

Contour-Plot Methodology for MEMS Inertial Sensor Design Optimization

劉士元 , Masters　　Advisor：李尉彰　　

繁體中文 DOI： 10.6342/NTU202101913

輪廓圖；微機電慣性感測器；加速度計；陀螺儀；設計方法；最佳化； Contour plots ； MEMS Inertial sensor ； Accelerometer ； Gyroscope ； Design methodology ； Optimization

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As the MEMS inertial sensor has penetrated into various fields, its commercial products, such as gyroscope, accelerometer, etc. are command devices with numerous amounts in our life. Due to the geometric complexity of such devices, most of these inertial sensors rely on the finite element method in the design stage, the fundamental reason is that the complicated trade-off relationship leads to any point of geometry parameter adjustment that may have a huge effect on its behavior. Therefore, repeated verification through the finite element method is the most command design method. Obviously, it is time-consuming and costly, and when there is a new design that needs to be adjusted, it often requires more attempts. For the designer, it is not intuitive to use, as if it can be obtained by just throwing the parameters into a black box. The de-sign is difficult to optimize for specific goals.Therefore, this research hopes to improve this problem through the Contour plots design methodology. The framework is to first understand the problem definition of the device, such as geometric parameters, process constraints, specifications, etc. And then use the related physical equations to obtain the relationships between geometry parameters and physics behavior. At the same time using numerical calculations, a large number of design points are calculated through mathematical software to obtain the solution of each combination, and then through the physical characteristics, the results are divided according to variables. The contour map of the specific physical quantity versus the geometric parameter can be obtained. With the advantage of con-tour plots, such as data trend is obvious, and be able to observe multiple overlays, can be used to assist the designer in finding a design that meets the goal.

Reference ( 30 ) 〈TOP〉

G. K. Balachandran, V. P. Petkov, T. Mayer and T. Balslink, "A 3-Axis Gyroscope for Electronic Stability Control With Continuous Self-Test," IEEE Journal of Solid-State Circuits, vol. 51, no. 1, pp. 177-186, Jan. 2016.
S. A. Zotov, M. C. Rivers, A. A. Trusov and A. M. Shkel, "Chip-scale IMU using folded-mems approach," IEEE Sensors, pp. 1043-1046, 2010.
Y. Jeong, D. E. Serrano, V. Keesara, W. K. Sung and F. Ayazi, "Wafer-level vacuum-packaged triaxial accelerometer with nano airgaps," in IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 2013.
A. I. Khuri and S. Mukhopadhyay, "Response surface methodology," in Wires Computational Statistics, 2010, pp. 128-149.
M. M. Saleem and . A. Somá , "Design of experiments based factorial design and response surface methodology for MEMS optimization," Microsyst Technol, pp. 263-276, Jan. 2015.

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