X光吸收光譜對氮與硼摻雜奈米鑽石薄膜之研究

X-ray Absorption Spectroscopy Study of Nitrogen- and Boron-doped Nanocrystalline Diamond (NCD) Thin Films

邱晉儀(Chin-Yi Chiu)

指導教授 ： 張經霖

淡江大學/理學院/物理學系碩士班/碩士(2006年)

https://doi.org/10.6846/TKU.2006.00399

摘要

本論文研究以偏壓輔助微波電漿化學氣相沈積法（MPECVD），在矽的基板上所合成的P型與N型半導化的奈米鑽石薄膜。 X光吸收近邊緣結構（X-ray Absorption Near Edge Structure)，對奈米鑽石薄膜之鍵結與電子結構來做分析，並找出摻雜元素在奈米鑽石膜中所造成的的影響。
我們發現在微米鑽石系列與奈米鑽石系列，在掺雜氮(或硼)時，sp2與sp3變化會因晶粒尺寸改變，此現象對應到場發射特性上，可以推測微米鑽石系列與奈米鑽石系列掺雜機制不同，場發射改善的原因也不同，在此論文中我們將深入討論。

關鍵字

X光吸收光譜 ； 奈米鑽石

並列摘要

Nitrogen- and Boron-doped Nanocrystalline Diamond (NCD) Thin Films were deposited on silicon substrate using a Microwave plasma-enhanced chemical vapor deposition (MPECVD) method. X-ray absorption near-edge structure (XANES), measurements have been performed chemical structure and bonding configuration for a variety of Nitrogen- doped、Boron-doped and undoped Nanocrystalline diamond Thin films.
We find that sp2 and sp3 in microcrystalline diamond series and
Nanocrystalline diamond series are different, when the grain size is reducing. The phenomenon is corresponding to the field emission properties. We suggest that doping in MCD and NCD have different mechanism. We will discuss in this paper.

並列關鍵字

XANES ； NCD ； Nanocrystalline Diamond

參考文獻

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[44] Y. D. Chang, A. P. Chiu, and W. F. Pong,

doped, type Ib diamond, and boron-doped diamond”,

[42] M. Lübbe, P. R. Bressler, D. Drews, W. Braun and D.

and R. P. H. Chang, “The effect of nitrogen