近年來有學者指出蕭特基接觸奈米感測元件在紫外線、氣體與生 物感測上都可以提供很好的感測靈敏度。為了進一步使蕭特基接觸感 測元件在訊號輸出強度方面有有效的提升。本研究利用氧化鋅奈米線 製成多通道奈米感測元件,藉由通道與蕭特基電極端的增加,使感測 時的訊號輸出強度提升。在紫外線感測實驗中,多通道蕭特基接觸元 件不僅可以提升光電流輸出訊號,也保留了單通道蕭特基接觸元件在 元件操作上良好的穩定度。而在一氧化碳的感測實驗,甚至對5ppm 的氣體也能有很好的訊號辨識度。藉由研究多通道蕭特基接觸元件, 更能提升未來感測元件在實際應用可能性。
The Schottky-gate nanosensor has good sensitivities for UV, gas and biomolecule detection. To improve the current output level for commercial application, the multi-channels device was fabricated by using ZnO nanowire. With increasing the schottky-gate number, the sensitivity and current output of the signal were enhanced. For UV sensing, the current output of the Multi-channels devices were increasing and without degenerating the stability compare to the Single-channel device. For gas sensing, 5ppm CO can be detected at 275℃. The Schottky-gate nanosensor have great applications for gas and UV detection by increasing the Schottky-gate number.