超短程垂直式二維材料約瑟芬結之製作與特性量測

蔡詠翔

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超短程垂直式二維材料約瑟芬結之製作與特性量測

Fabrication and characterization of ultimately short vertical two-dimensional material Josephson junctions

蔡詠翔 , Masters　　Advisor：郭華丞　　

繁體中文

約瑟芬結；石墨烯；二硫化鉬； Josephson junction ； graphene ； MoS2

Abstract │ Reference (23)

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

The structure of ultimately short vertical Josephson junction can suppress the diffusion properties in conductive channels and/or interfaces in superconducting quantum devices. In this study, we choose two-dimensional (2D) materials synthesized by chemical vapor deposition, such as graphene and molybdenum disulfide as barrier layer and superconducting Ti/Al electrodes to form vertical Al/Ti/2D material/Ti/Al Josephine junction. We propose a novel device fabrication process that integrates optical lithography and electron beam lithography to improve sample yield and yield. First, a 75 nm thick Si3N4 thin film was fabricated on the silicon substrate, and a micrometer-sized hole was formed on the thin film. The hole defined the cross-section of the Josephson junction. Next, 2D materials were transferred onto the top of the chip, covering the holes. Finally, Ti/Al electrodes were deposited onto the top and bottom sides of the chip using physical vapor deposition.
The normal state resistances of the samples using graphene barrier layer are within  the range between 150 Ω and 200 Ω. The Al electrodes become superconducting at a critical temperature (Tc) of 1.62 K. At the temperature of 10 mK, the junction exhibits a superconducting current of 20 μA. In contrast, the normal state resistances of the samples using MoS2 are in between 200 kΩ and 600 kΩ. The samples exhibit non-linear IV characteristics at low temperatures. The high-bias current increases when a negative gate voltage is applied, reflecting a p-type semiconductor property. The superconducting current is induced when the gate voltage is less than -0.62V. A supercurrent of 0.13 μA can be observed at Vg=-0.74 V. By applied with a large bias current, the devices can be annealed and the sample becomes much conductive. The annealed junction shows a lager superconducting current of 7.2 μA at a temperature of 20 mK. Microwave excitation only slightly reduces the superconducting current, which may be due to the weak coupling between the microwave and the junction.

Reference ( 23 ) 〈TOP〉

1. Josephson, B. D. Possible new effects in superconductive tunnelling. Physics Letters. 1962, 1 (7): 251.
2. Josephson, Brian D. The Discovery of Tunneling Supercurrents. Nobel Lecture. 1973-12-12.
3. Anderson, P W; Rowell, J M. Probable Observation of the Josephson Tunnel Effect. Phys. Rev. Letters. 1963, 10: 230.
4. Seong Jang, Eunseong Kim, Short ballistic Josephson coupling in micrometer-long tantalum/graphene/tantalum junction. Current Applied Physics, 2019, 19 (4): 436.
5. Lee, G.H., et al., Ultimately short ballistic vertical graphene Josephson junctions. Nat Commun. 2015. 6: 6181.

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