應用錫球陣列與覆晶技術之CMOS微磁通閘設計及製作

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應用錫球陣列與覆晶技術之CMOS微磁通閘設計及製作

Design and Fabrication of CMOS Micro-Fluxgate Magnetic Field Sensors with BGA and Flip-Chip Technologies

邱士良 , Masters　　Advisor：呂志誠;鄭振宗　　

繁體中文

磁通閘；磁場感測器； CMOS ；覆晶技術； BGA錫球； Fluxgate ； Magnetic Sensors ； CMOS ； Flip-chip ； BGA

Abstract │ Reference (28) │ Times Cited (1) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

In this study, we design and fabricate a micro fluxgate magnetic sensor with dual magnetic cores by CMOS process and BGA (Ball Grid Array) flip-chip techniques, and analyze the effect caused by different design. The micro fluxgate fabricated by flip-chip improves from wire-bonding, using two identical chips to complete the whole excitation and be connected by BGA attached to electrode.
Compared to wire-bonding type, this new design contains a pick-up coil with double turns ,which can increase the sensitivity. The chips is fabricated by TSMC 0.35 μm 2P4M processes. The overall area of a single chip is 2.7 mm 2.4 mm. We use photo-lithography technique to fabricate the magnetic cores and use flip-chip concept to design the whole structure. In order to discuss more about the influence about the excitation toward the performance, we also use PCB to design a micro fluxgate with larger scale to verify the feasibility of the flip-chip concept and found that this design has a higher sensitivity and lower noise. In 50 kHz excitation frequency, and excitation current is 600 mA, the transfer coefficient is 593.44 V/T and the noise is 0.054 nT/√Hz. 
In this new design we improve the previous wire-bonding structure, enhance the stability and double the pick-up signal. In the future, the design and fabrication processes can be improved consistently to realize a sensitive and easy-to-fabricate micro fluxgate sensor.

Reference ( 28 ) 〈TOP〉

[1] Richard Dixon, " Rising Usage in Automotive, Wireless and Consumer Electronics Drives 22 Percent Growth for Magnetic Sensor Market in 2011 " August 6, 2012 , MEMS & Sensors, IHS iSuppli.
連結：
[4] James Lenz and Alan S. Edelstein, " Magnetic Sensors and Their Applications," IEEE Sensors Journal, Volume 6, Number 3, Pages 631-649, June 2006.
連結：
[5] Andrea Baschirottoa, Enrico Dallagob, Massimo Ferrib, Piero Malcovatib, Andrea Rossinib, Giuseppe Venchib," A 2D micro-fluxgate earth magnetic field measurement systems with fully automated acquisition setup, " Measurement, Volume 43, Issue 1, January 2010, Page 46-53.
連結：
[7] National Aeronautics and Space Administration (NASA), " Fluxgate Magnetometer (MAG) ".
連結：
[8] M. N. Nabighian, V. J. S. Grauch, R. O. Hansen, T. R. LaFehr, Y. Li,1 J. W. Peirce, J. D. Phillips, and M. E. Ruder, "The historical development of the magnetic method in exploration, " Geophysics 70: p.33ND–61ND, 2005.
連結：

Times Cited (1) 〈TOP〉

黃捷(2014)。平面式三軸磁通閘磁場感測器之設計與分析。臺北科技大學機電整合研究所學位論文。2014。1-71。

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