利用動態光散射原理研發光纖式奈米顆粒量測系統

Development of a Nanoparticle Fiber Type Measurement System Using Dynamic Light Scattering For Fabrication Monitoring

紀柏宏(Boa-Hong Ji)

指導教授 ： 張合 ； 陳亮嘉

國立臺北科技大學/機電學院/機電整合研究所/碩士(2006年)

https://doi.org/10.6841/NTUT.2006.00163

摘要

動態光散射檢測系統 (Dynamic Light Scattering System, DLS)是屬於光電量测重要中的ㄧ環，可用來量測平均奈米粉體粒徑的大小與分佈，但國人對此項技術了解並不深入，故此研究為國人自行發展一套低成本奈米流體粒徑檢測儀器，同時也研發一套可以將光纖作為量測探頭的動態光量測系統，使用光纖可減低光路對準程序的繁雜，以及光纖較不受量測距離的限制等因素，進而對未來的線上奈米粒徑量測之發展建立基礎，本研究系統透過光學鏡組的對準以及光路系統的處理規劃，透過光子計數器(photon counters)之訊號截取及數位相關計數器(digital correlator)的訊號處理，獲得奈米粉體之動態光散射訊號與自相關數據，同時，配合奈米顆粒在液體中作布朗運動(Brownian motion)之原理和史托克-愛因斯坦(Stokes-Einestein)方程式，計算出粉體平均粒徑大小與分佈。為了瞭解此自製之量測準確性，將使用標準粒徑大小之粉體進行多次量測，證實粒徑量測之平均誤差在12%之內。

關鍵字

動態光散射 ； 光電量測 ； 粉體粒徑檢測 ； Stokes-Einestein原理 ； 布朗運動

並列摘要

This article presents the development of an on-line measurement and control system to characterize and optimize the nanoparticle manufacturing process, called the submerged arc spray nanoparticle synthesis system (SANSS) currently being developed by the Nano fabrication Laboratory of Taipei University of Technology. The desired uniformity of nanomaterials has been widely recognized as an extremely important step towards successful development of nanomaterials for technology breakthrough. The SANSS has been developed to generate nanoparticles and to explore the possibilities of optimized processes of generating desired nanopowders. In the SANSS, Titanium oxide nanoparticles are prepared physically using vacuum-controlled electric arcing through nucleation, growth and condensation in de-ionized water. To achieve an optimized system control of particle uniformity, the research investigates the feasibility of using an optical fiber probe based on dynamic light scattering (DLS) technique to monitor and control particle sizes in the SANSS. Based on the DLS, an on-line nanoparticle sampling and measurement system was developed and integrated with the SANSS as an important step to verify the feasibility and performance of the proposed method. Details of system design and experimental results are included to evaluate the outcomes of this approach. To test the measurement accuracy of the developed system, the calibrated polystyrene latex particles with known accurate sizes were applied to verify the feasibility of the proposed methodology. The data conformity between the measurement results of TiO2 nanoparticles by the various methods, including TEM, a calibrated commercial particle sizing system and the on-line measurement system, has indicated that the developed method was feasible and effective.

並列關鍵字

dynamic light scattering ； TiO2 nanoparticles, process characterization ； nanoparticle measurement ； nanoparticle synthesis

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