高科技廠房耗能分析軟體開發

鄭伊芸

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College of Mechanical and Electrical Engineering > Master's Program, Department of Air-conditioning and Refrigeration Engineering
Engineering > Municipal Engineering & Environment Engineering
Engineering > Electrical Engineering

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高科技廠房耗能分析軟體開發

Development of a High Tech. Fab Energy Simulation (FES) Software

鄭伊芸 , Masters　　Advisor：胡石政　　

繁體中文

高科技廠房耗能模擬；潔淨室；年耗能； Fab Energy Simulation ； Cleanrooms ； Annual energy consumption

Abstract │ Reference (16) │ Times Cited (1) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

The electronic industry in Taiwan mainly focuses on semiconductor and optoelectronic manufacturing. In accordance with the electricity-consumption data of Taiwan Power Company in 2013, the power consumption of electronic manufacturing sector occupies 17.16% (about 50 billion kWh) of the total power consumption in Taiwan, of which consumes on those clean room based fabrication plants (hereafter referred Fab). This very high value shows that the high-tech manufacturing is actually a high-energy consuming industry. Semiconductor Fab, for example, factory facility shares about a half of the total plant power consumption, while process equipment accounts for about 46%, office accounts for another 4%. In the facility sector, air conditioning, and exhaust system etc. accounted for more than 70% of the electricity consumption. In addition to annual maintenance, most Fabs run a 24-hour operation mode. Thus, to save the power consumption of the facility system, air conditioning can be classified as the first priority. High-tech Fabs are different from those commercial buildings. A Fab needs a lot of outside air, while outside air and circulating air often treated separately. In such arrangement, a great energy on transporting air and ductworks can be saved. eQUEST and DOE II, the general building energy analysis software, can only handle the air-conditioning system for the outside air mixed with return air through the centralized system, which is totally different from that of Fab air-conditioning system. Plus, the eQUEST and DOE II does not include electricity consumption items, such as process cooling water system, compressed dry air system, nitrogen system, vacuum system, and exhaust system. Fab process equipment cooling system is not included in the eQUEST, DOE II modules either. For the implementation of green building labeling system on Fabs, it should not focus only the energy consumption on building envelops or offices. Over the years, no dedicate Fab energy analysis software is available. In this study, a Fab Eenergy Simulation (FES) software was developed. which with features such as: open source code, with Chinese interface, takes the full year of outside air data into account, capable of handling the general adopted air-conditioning modes. Power consumption of each system will also be explored with various energy-saving designs. With the same input data, the percentage difference of output between the FES and that of ISMI Cleancal II is less than 7% in each output category. The software was also verified by the power consumption data of an operating 8 in wafer Fab, with less than 4% in each output category. Increasing the COP of chiller or decreasing the power consumption of process tools enable a higher overall fab energy conservation effect. On the contrary, the saving in electrical consumption was not so significant when the energy efficient improvement was only on the end terminal or air side element.

Reference ( 16 ) 〈TOP〉

[5]Philip Naughton, Measurement of Conservation of Energy by Semiconductor Manufacturing Equipment and setting of targets for improvements, IEEE International Symposium on Semiconductor Manufacturing (ISSM 2005), 2005, San Jose, 7-14.
連結：
[6]鄭淙翾，高科技廠房全年能源消耗計算與軟體開發，碩士論文，國立台北科技大學能源與冷凍空調工程所，台北，2011年。
連結：
[7]ASHRAE, ASHRAE Handbook of Fundamentals, American Society of Heating, Refrigerating and Air Conditioning Engineering Inc., Atlanta, 2005, P6.1-6.17.
連結：
[9]F.C. McQuiston, J.D. Parker, J.D. Spitler, Heating, Ventilating, and Air Conditioning: Analysis and Design, 6th Ed., John Wiley & Sons, Inc., U.S.A. 2005.
連結：
[11]ASHRAE, INTERNATIONAL WEATHER FOR NEERGY CALCULATIONS (IWEC WEATHER FILES) USER’S MANUAL, American Society of Heating, Refrigeration and Air-Conditioning Engineers, 2001, P20.
連結：

Times Cited (1) 〈TOP〉

徐榮生(2014)。廠務設備能源轉換係數之建立及其於節能之應用:以中小尺寸面板廠為研究標的。臺北科技大學優質電力供電產業研發碩士專班學位論文。2014。1-63。

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