應用銲線與覆晶後製程之CMOS微磁通閘製作與特性分析

劉育廷

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應用銲線與覆晶後製程之CMOS微磁通閘製作與特性分析

Fabrication and Characterization of CMOS Micro-Fluxgate with Wire-Bonding and Flip-Chip Post Process

劉育廷 , Masters　　Advisor：呂志誠;鄭振宗　　

繁體中文

磁通閘；磁場感測器； CMOS ；覆晶技術； micro fluxgate ； magnetic sensor ； CMOS ； Flip-chip

Abstract │ Reference (25) │ Times Cited (1) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

This paper presents a dual-core (Vacquier-type) micro-fluxgate magnetic sensor fabricated on a silicon chip based on standard CMOS technology. The 3D design with both excitation and sensing coils winding the cores can achieve a higher responsivity and a lower noise level, but the cost in mass production would be much higher in comparison with planar design. The silicon chip is 2.5 mm 2.5 mm in dimension, and the micro-fluxgate sensor occupies the area of 2.5 mm 1.8 mm. The sensor consists of magnetic cores, planar pick-up coils, bottom excitation coils (CMOS Al interconnections) and upper excitation coils (wire-bonding Al wires). The micro-solenoid excitation coils consisting of aluminum bonding wires and CMOS metallic layers can generate out-of-phase excitation magnetic fields strong enough to saturate the two magnetic cores. It was found that the sensor’s sensitivity can be optimized and the field noise spectral density can be minimized by adjusting the excitation current as well as the excitation frequency. The responsivity at the second harmonic of 25-kHz excitation frequency is maximized to 4.32 V/T when the excitation current is 174.9 mA. The largest responsivity of 9.43 V/T occurs at the second harmonic when the excitation frequency is 210 kHz and the excitation current is 174.9 mA. The minimum field noise of our device was found to be 1.7 nT/√Hz at 1 Hz under a 20-kHz excitation. In comparison with other miniature planar fluxgates with similar dimensions reported to date, our device has a relatively low field noise spectral density. In addition, the fabrication process of a new micro-fluxgate design with flip-chip technology was also investigated and the feasibility of this scheme was evaluated.

Reference ( 25 ) 〈TOP〉

[1] Trifon M. Liakopoulos, Chong H. Ahn, " A micro-fluxgate magnetic sensor using micromachined planar solenoid coils," Sensors and Actuators A: Physical, Volume 77, Issue 1, Pages 66-72, 28 September 1999.
連結：
[2] James Lenz and Alan S. Edelstein, " Magnetic Sensors and Their Applications," IEEE Sensors Journal, Volume 6, Number 3, Pages 631-649, June 2006.
連結：
[5] M. N. Nabighian, V. J. S. Grauch, R. O. Hansen, T. R. LaFehr, Y. Li,1 J. W. Peirce, J. D. Phillips, and M. E. Ruder, "The historical development of the magnetic method in exploration, " Geophysics 70: p.33ND–61ND, 2005.
連結：
[6] F Primdahl, "The fluxgate magnetometer, " J. Phys. E：Sci. Instrum., vol. 12, pp. 241-253, 1979.
連結：
[7] Thomas Seitz, "Fluxgate Sensor in Planar Microtechnology, " Sensors and Actuators,A21-A23, pp.799-802, 1990.
連結：

Times Cited (1) 〈TOP〉

邱士良(2014)。應用錫球陣列與覆晶技術之CMOS微磁通閘設計及製作。臺北科技大學機電整合研究所學位論文。2014。1-65。

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