以靜電紡絲技術發展含奈米結構之氣體微感測器

莊寓翔

doi:10.6341/fcu.M0019363

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以靜電紡絲技術發展含奈米結構之氣體微感測器

Development of Nanofiber-based Gas Microsensors by Using Electrospun Technology

莊寓翔 , Masters　　Advisor：張興政;賴啟智　　

繁體中文 DOI： 10.6341/fcu.M0019363

靜電紡絲；奈米纖維；氧化銦；氣體微感測器； Electrospinning ； Nanofiber ； Indium oxide ； Gas microsensors

Abstract │ Reference (35) │ Altmetrics

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The research presents the design of metal-oxide semiconductor gas microsensors based on MEMS technology and nano-properties for sensing CO gas. Sensitivity is defined by measuring the variation of resistance for sensing layers caused by Schottky contanct when gas specimens adsorb on the surface of sensing films. In2O3 nanofibers sensing film with heaters is fabricated by electrospinning, lithography and deep etching processes. The devices can increase effective sensing area for chemical reactions on which CO gas molecules can be adsorbed to improve operation process and response time. Fabrication parameters of indium oxide sensing films are discussed at different voltage, flow rate, collection distance, to perform optimal nanofibers. The sensitivity for sensing the concentration of CO gas is concluded. This sensor integrated the heater temperature sensor and carbon monoxide gas sensor, with characteristic measurements as a result, validation and production of micro gas sensor characteristics are discussed. The heater of the sensor when additional 60 V, the highest temperature can reach 162 ℃, temperature sensor response to linear its sensitivity is 2.09 Ω/℃, gas sensor optimal operating temperature is 160 ℃. Electrostatic spinning wire sensor, measurement of carbon monoxide concentration of 50 to 500 ppm, resistance rate of 1.082 to 1.804.

Reference ( 35 ) 〈TOP〉

[4] D. H. Reneker and I. Chun, “Nanometre Diameter Fibres of Polymer Produced by Electrospinning,” Nanotechnology, Vol. 7, pp. 216-223, 1996.
連結：
[5] S. Haider and S. Y. Park, “Preparation of the Electrospun Chitosan Nanofibers and Their Applications to the Adsorption of Cu(II) and Pb(II) Ions from an Aqueous Solution,” Journal of Membrane Science, Vol. 328, pp. 90-96, 2009.
連結：
[6] H. Fong, I. Chun and D.H. Reneker, “Beaded Nanofibers formed During Electrospinning,” Polymerm, Vol. 40, pp. 4585-4592, 1999.
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[7] J. B. Ballengee and P. N. Pintauro, “Morphological Control of Electrospun Nafion Nanofiber Mats,” Electrochemical Society, Vol. 158, pp. 568-572, 2011.
連結：
[8] A. Murali, A. Barve, V. J. Leppert and S. H. Risbud, “Synthesis and Characterization of Indium Oxide Nanoparticles,” Nano Latters, Vol. 1, pp. 287-289, 2001.
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