EI控制器在動態模型下之績效及穩定性分析

詹昱宏

3.239.51.78，Hello！

Close
Search Quick Search Advanced Search Publication Search	Personal Service Member Login Searching History Use Bonus Card SYMSKAN
Browse Browse by University of Graduate Thesis Browse by Pinyin of Graduate Thesis Browse by Conference Proceedings Topic Browse by Conference Proceedings Publisher Browse by Pinyin of Conference Proceedings Browse by eBook Category Browse by eBook Topic Browse by eBook Publisher
Customer Services Authorize Airiti Recommend a Journal

Search Symbol (Half-width)	Description of Search Symbols
Space	"AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " )	Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" ： " image process "
?	Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
*	Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )
AND、OR、NOT	Boolean logic combinations of key words is a skill used to expand or refine search parameters. (1) AND (1) AND: Refines search parameters (2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters

DOI stands for Digital Object Identifier （ D igital O bject I dentifier ） ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「http://dx.doi.org/」「 http://dx.doi.org/ 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: http://dx.doi.org/ 10.5297/ser.1201.002 。
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI Registration （ doi.airiti.com ）。

Data Source

Basic & Applied Sciences > Mathematical Statistics
College of Science > Graduate Institute of Statistics

Bibliography Management Tool

Related Links

Report an Issue

Search in Library

There is no full-text available at the moment. Airiti would like to request author's authorization. I would like to provide authorization.

EI控制器在動態模型下之績效及穩定性分析

Performance and Stability Analysis of EI Controller under Dynamic Models

詹昱宏 , Masters　　Advisor：曾勝滄　　

繁體中文

批次控制；動態模型；折扣因子；穩定條件； PI控制器； EWMA回饋控制器； EI控制器； R2R ProcessControl ； Stability Condition ； Dynamic Model ； HASH(0x1cd4af70) ； HASH(0x1cd4b010) ； HASH(0x1cd4b0b0) ； HASH(0x1cd4b150)

Abstract │ Reference (13) │ Times Cited (1) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

Run-to-run (R2R) process control is well developed in semiconductor manufacturing communities. The exponential weighted moving average (EWMA) controller that is a popular model-based R2R controller has received great attention in literature. However, in practical applications, the process I-O model is complex and hybrid, and the effect of the input recipe on the output response can be carried over several periods. The Single EWMA controller is a MMSE controller for the static I-O model with the process disturbance following IMA(1,1) and the process parameters being known. It does not eliminate the effects on the dynamic parameters and cause a highly initial bias for the first few batches. In this paper we propose the Exponentially Integral (EI) controller to adjust the dynamic models. First, we derive the stability condition of EI controller and the optimal discount factor, and provide a robust discount factor selection. Finally, comparing with a Single EWMA controller, the performance of EI controller is better than Single EMWA controller under various combinations of parameter, especially in the dynamic parameter large.

Reference ( 13 ) 〈TOP〉

[1] Del Castillo, E. (1999), “Long Run and Transient Analysis of a Double EWMA Feedback Controller,” IIE Transactions, 31, 1157-1169.
連結：
[2] Fan, S., Jiang, B. C., Jen, C. H. and Wang, C. C. (2002), “SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes”, International Journal of Production Research, 40(13), 3093-3120.
連結：
[3] Ingolfsson, A. and Sachs, E. (1993), “Stability and Sensitivity of an EWMA Controller,” Journal of Quality Technology, 25, 271-287.
連結：
[4] Jen, C. H. and Jiang, B. C. (2007), “Combining on-line experiment and process control methods for changes in a dynamic model”, International Journal of Production Research, 46(13), 3665-3682.
連結：
[5] Pan and Del Castillo (2001), “Identification and fine tuning of closed-loop processes under discrete EWMA and PI adjustments,” Quality and Reliability Engineering International, 17, 419-427.
連結：

Times Cited (1) 〈TOP〉

王祥帆(2009)。具有量測延遲與虛擬量測之Single EWMA控制器。清華大學統計學研究所學位論文。2009。1-45。

Altmetrics

〈TOP〉

E-mail ：

When an article is available to download, a notice will be sent to your mailbox address.

E-mail ：