具有極高靈敏度之單根氧化鋅奈米線一氧化氮氣體感測器

陳信宏

doi:10.6843/NTHU.2013.00496

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具有極高靈敏度之單根氧化鋅奈米線一氧化氮氣體感測器

Single ZnO Nanowire Sensors for Nitric Oxide Gas Sensing with Ultrahigh Sensitivities

陳信宏 , Masters　　Advisor：林鶴南　　

繁體中文 DOI： 10.6843/NTHU.2013.00496

氧化鋅奈米線；一氧化氮；氣體感測器； ZnO nanowire ； nitric oxide ； gas sensor

Abstract │ Reference (34) │ Times Cited (1) │ Altmetrics

Abstract 〈TOP〉

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In this work, nitric oxide (NO) gas sensors with ultrahigh sensitivities based on single ZnO nanowires (NWs) are reported. The sensing principle is because NO is an oxidizing gas and the adsorption of gas molecules on the NW surface causes the NW conductance to decrease. An individual sensor is composed of a single ZnO NW with a diameter of around 300 nm in contact with Ti electrodes of 100, 300 or 500 nm thick created by photolithography. The fabricated devices have been utilized to sense NO gas in a concentration range between 0.1 and 2 ppm at room temperature. For the sensors with electrodes of 100 and 300 nm thick, ultrahigh sensitivities over 104 are achieved for 2 ppm NO sensing. From the I−V curves, it is found the contact is Ohmic type prior to exposure to NO and turns to Schottky type afterwards. For the sensor with electrodes of 500 nm thick, the sensitivity is around 102 and much lower than the previous values. In addition, the contact remains Ohmic type after NO sensing. The results indicate that the contact characteristic change at NW-electrodes interface is the dominant mechanism for the ultrahigh sensitivity of gas sensing and it can be modified by the electrode thickness.

The results show the response time decreases as the NO concentration increases due to faster adsorption of NO gas under higher concentration. The response time is defined as time needed for the current to become 10 percent of the initial current. In addition, under the same concentration of 0.1 ppm, the response time of the sensors with 100, 300 and 500 nm thick electrodes are 331, 183 and 26 s, which means the response is faster as the electrode thickness increases. Besides, the adsorption and desorption rate constants of Ohmic type device can be calculated to derive the carrier concentration of ZnO NW. Therefore, we can fabricate a NO gas sensor with high sensitivity or fast response by changing the thickness of electrodes, and it has the advantages of room-temperature functionality and repeatability.

Reference ( 34 ) 〈TOP〉

[1] C. Li, D.H. Zhang, X.L. Liu, S. Han, T. Tang, J. Han, et al., In2O3 nanowires as chemical sensors, Appl. Phys. Lett. 82 (2003) 1613-1615.
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[2] L.B. Kreuzer, C.K.N. Patel, Nitric oxide air pollution: detection by optoacoustic spectroscopy, Science 173 (1971) 45-47.
連結：
[3] U. Frandsen, M. Lopez-Figueroa, Y. Hellsten, Localization of nitric oxide synthase in human skeletal muscle, Biochem Biophys Res Commun, 227(1996) 88-93.
連結：
[4] W. Maziak, S. Loukides, S. Culpitt, P. Sullivan, S.A. Kharitonov, P.J. Barnes, Exhaled nitric oxide in chronic obstructive pulmonary disease, Am J Respir Crit Care Med, 157(1998) 998-1002.
連結：
[5] S.A. Kharitonov, D. Yates, R.A. Robbins, R. Logansinclair, E.A. Shinebourne, P.J. Barnes, Increased nitric oxide in exhaled air of asthmatic patients, Lancet, 343 (1994) 133-135.
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Times Cited (1) 〈TOP〉

柯賢文(2016)。氧化亞銅奈米顆粒修飾氧化鋅奈米線於大氣環境中之一氧化氮氣體感測應用。清華大學材料科學工程學系學位論文。2016。1-87。

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