半導體晶圓廠無塵室空調系統風險評估

The Risk Evaluation of Air-condition System on Semiconductor Wafer Fabrication Clean Room

姚杰明(Jye-Ming Yao)

指導教授 ： 楊錦洲

中原大學/工學院/工業工程研究所/碩士(2001年)

https://doi.org/10.6840/cycu200100487

摘要

自1947年發明電晶體，1959年發明積體電路；1971年發明微處理器。使得人類歷史與生活發生了革命性的改變。
隨著需求與科技快速進展，半導體原件越作越小；速度越來越快，功能越來越強。
1965年英特爾名譽董事長Gordon，提出Moore(摩爾)定律；揭櫫半導體產業未來發展趨勢，『每一代新發展出之晶片產品，其電路密積度及性能；均為上一世代之兩倍。開發之時間約略為18~24個月。回顧半導體市場規模，自1979年3〞及4〞晶圓時代；並首度突破100億美元，至1994年由5〞及6〞，進展至8〞時代；亦超越1,000億美元大關。
根據估計，全球半導體市場規模，將可望在2003年時，達到近3,000億美元之水準。半導體產業之現今及未來發展，不得不成為世人所觀注之焦點。
隨著科技發展不斷日新月益，半導體元件日趨精細、精密，已進入『深次微米』階段；其生產所需之環境要求亦日益嚴苛；如何維持、控制，生產所在無塵室所需之嚴苛環境；無不為半導體廠廠務工程師，所面臨之極度挑戰。而若要營造與維持一良好之環境，則首要便是須辨別出其所面臨之風險為何？其嚴重度又有多大？而予以避免並加以改善。
本文所要探討的即是，利用『定量』及『定性』等分析手法；評估出半導體晶圓廠，無塵室既有『空調系統』中所存在之風險與盲點，並實際計算出其可能造成危害之風險度。並以此作為後續改善之參考依據。

關鍵字

空調系統 ； 晶圓廠 ； 半導體 ； 風險評估

並列摘要

The revolutionary change happened in the human history and life, because of the invention of transistor [1947], integrated circuit [1959], and microprocessor [1971]. Also the dominant trend for device miniaturization in IC technology owes its impetus to lower cost per function, lower power consumption, higher device speed, and the use of continually larger wafers. However, in the last 35 years, the IC technology development is observed to follow the Moore’s Law. (Moore’s Law: described a trend that each new chip contained roughly twice as much capacity as its predecessor, and each chip was release within 18~24 months of the previous chip. In the other hand, the semiconductor market grows from ten billion dollars, in the age of 3 to 4 inch wafer in 1979, through one hundred billion dollars, in the age of 8 inch wafer, to three hundred billion dollars in 2003 by forecasting. The fast growth speed grabs the spotlight in the past and future.
As the process technology develops from 10 to 0.13 μm, also called “deep sub-micron”, in the last 30 years, then the process control becomes more and more difficult. One of the challenges is how to produce, control, and maintain a good clean room environment for the semiconductor production. And to identify the risk is the first step for this challenge.
In this study, the risk and the blind spot of the air conditioning system of the clean room in the semiconductor fabrication company are explored by the quantitative and qualitative methods. Also the damage caused by the risk is calculated for the reference of further improvement.

並列關鍵字

risk ； Clean Room ； Wafer ； Semiconductor ； Fabrication ； Air-condition System

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