本文探討採用毛細管節流器與單向薄膜節流器閉式靜壓滑軌的特性,以及最佳化剛度之設計。滑軌的形式為平軌單列多油腔式,潤滑油來源為定壓供油方式。根據流量守恆原理,且假設滑軌油腔之間的壓力是呈線性分佈,建立一般化流量平衡方程式,以求解出滑軌各油腔之壓力,進一步求解靜壓滑軌之承載能力及剛度,最後以遺傳基因演算法搜尋對應承載力下滑軌最大剛度之最佳化設計參數。 毛細管節流器為被動式節流器,而單向薄膜節流器則為主動式節流器,分別比較使用這兩種節流器閉式靜壓滑軌的特性,可以得到在特定工作台位移率時,使用單向薄膜節流器比毛細管節流器具有較佳的承載力及剛度。 最佳化計算是採用遺傳基因演算法,以滑軌剛度最佳化為目標,在固定滑軌油腔幾何尺寸、油腔數目、滑軌移動速度、工作溫度、潤滑油型號與節流器種類等設計參數下。使用毛細管節流器時,尋求毛細管節流器節流參數、滑軌初始間隙與供油壓力等三個設計參數的最佳值;使用單向薄膜節流器時,尋求薄膜節流器節流參數、薄膜補償係數、滑軌初始間隙與供油壓力等四個設計參數的最佳值,藉以得到對應滑軌負荷之最大剛度。
This thesis studies the characteristics of the externally pressurized, with multi-recessed, close-type, flat hydrostatic slideways by using the membrane or capillary restrictor as a compensating element. A comparative performance of the membrane compensated hydrostatic slideway system has also been studied vis-à-vis capillary restrictor. Furthermore, the optimal design analysis for maximum bearing stiffness is presented by using the genetic algorithm. The general equations for film pressure are provided according to the flow rate balance of slideways. Results are in terms of the load capacity and the bearing stiffness with the variations of the bearing displacement ratios, the restriction parameters and the membrane compliance. By using the genetic algorithm, the optimal design analysis is carried out under the setting design environments of numbers of recess, geometric size of recesses, and speed of slideways. For capillary restrictors, the optimal design parameters of supplied pressure, bearing clearance and restriction parameters are searched, whilst, the optimal design parameters of supplied pressure, bearing clearance, membrane restriction parameters and membrane compliance are searched for membrane restrictors. Finally, these optimal design parameters corresponding to the maximum bearing stiffness.