氧化鎳系化學感測器之研製

謝政諺

doi:10.6844/NCKU.2013.00087

3.239.45.252，Hello！

Close
Search Quick Search Advanced Search Publication Search	Personal Service Member Login Searching History Use Bonus Card SYMSKAN
Browse Browse by University of Graduate Thesis Browse by Pinyin of Graduate Thesis Browse by Conference Proceedings Topic Browse by Conference Proceedings Publisher Browse by Pinyin of Conference Proceedings Browse by eBook Category Browse by eBook Topic Browse by eBook Publisher
Customer Services Authorize Airiti Recommend a Journal

Search Symbol (Half-width)	Description of Search Symbols
Space	"AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " )	Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" ： " image process "
?	Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
*	Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )
AND、OR、NOT	Boolean logic combinations of key words is a skill used to expand or refine search parameters. (1) AND (1) AND: Refines search parameters (2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters

DOI stands for Digital Object Identifier （ D igital O bject I dentifier ） ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「http://dx.doi.org/」「 http://dx.doi.org/ 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: http://dx.doi.org/ 10.5297/ser.1201.002 。
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI Registration （ doi.airiti.com ）。

Data Source

College of Electrical Engineering & Computer Science > Graduate Institute of Microelectronics
Engineering > Electrical Engineering

Bibliography Management Tool

Related Links

Report an Issue

Purchase Single Articles

Download PDF

氧化鎳系化學感測器之研製

Fabrication of Nickel Oxide (NiO) Based Chemical Sensors

謝政諺 , Masters　　Advisor：劉文超　　

繁體中文 DOI： 10.6844/NCKU.2013.00087

延伸式閘極離子感測場效電晶體；氧化鎳；酸鹼感測器；吡咯；參考電極微小化；尿素感測器； EGFET ； NiO ； pH sensor ； pyrrole ； miniaturized reference electrode ； urea biosensor

Abstract │ Reference (114) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

In this study, the nickel oxide thin films were fabricated by radio frequency (RF) magnetron sputtering technology to be applied in the ion sensing electrode. Also, the thin film structure is connected with metal-oxide-semiconductor field-effect transistors (MOSFETs) to be the extended-gate field-effect transistors (EGFETs). In the thesis, the best parameters to fabricate nickel oxide are at sputtering power of 50 W, working pressure 0.002 torr, and without the substrate heating for 45 minutes, which has good sensitivity and linearity. In addition, the Hysteresis, drift, and reliability are also investigated.
And then, there are many disadvantages of the commercial reference electrode, such as large size, high cost, and non-portable characteristics. Therefore, the development of miniaturized reference electrode is needed. In the thesis, we develop the polypyrrole-based miniaturized reference electrode by electrodepositing method. According to the experimental result, the stable miniaturized reference electrode is obtained by electrodepositing at applied voltage 5 V for 10 seconds and then treating the base solution.
Finally, we proposed the NiO-based pH electrode as substrate to develop the urea biosensor by enzyme immobilization. According to the experimental result, the sensing range of urea is from 0.31 mg/dl to 80 mg/dl, which is included the normal human urea concentration from 14~31 mg/dl. Therefore, the NiO-based urea biosensor has large potential to be developed.

Reference ( 114 ) 〈TOP〉

1. Eftekhari, “pH sensor based on deposited film of lead oxide on aluminum substrate electrode,” Sens. Actuator B, vol. 88, no. 3, pp. 234-238, Feb. 2003.
連結：
2. P. Shuk and K.V. Ramanujachary, “New metal-oxide-type pH sensors,” Solid State Ion., vol. 86-88, no. 2, pp. 1115-1120, Jul. 1996.
連結：
3. P. Bergveld, “Development of an ion-sensitive solid-state device for neurophysiological measurements,” IEEE Trans. Biomed. Eng., vol. 17, no. 1, pp. 70-71, Jan. 1970.
連結：
4. B. D. Liu, Y. K. Su, and S. C. Chen, “Ion sensitive field effect transistor with silicon nitride gate for pH sensing,” INT. J. Electronics, vol. 67, no. 1, pp. 59-63, 1989.
連結：
5. K. Chen, G. Li, H. Lu, and L. Chen, “Effect of total hydrogen content in silicon nitride sensitive film on performance of ISFET,” Sens. Actuator B, vol. 12, no. 1, pp. 23-27, Mar. 1993.
連結：

Altmetrics

〈TOP〉

E-mail ：

When an article is available to download, a notice will be sent to your mailbox address.

E-mail ：