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Search Symbol (Half-width) Description of Search Symbols
Space "AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " ) Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" : " image process "
? Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
* Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )

Boolean logic combinations of key words is a skill used to expand or refine search parameters.
(1) AND (1) AND: Refines search parameters
(2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters


DOI stands for Digital Object Identifier ( D igital O bject I dentifier ) ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「」 「 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: 10.5297/ser.1201.002
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI ) 。

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Abstract 〈TOP〉
Parallel Abstract 〈TOP〉
Reference ( 57 ) 〈TOP〉
  1. 12. L. F. Thompson, C. G. Wilson, and M. J. Bowdon, "Introduction to Microlithography, 2ed.", ACS, Washington (1994).
  2. 14. D. A. Robert, O. Juliann, and E. L. Carl, Microlithography World, Winter, 5-8 (1999).
  3. 16. N. Saburo, U. Takumi, and I. Toshio, "Microlithography fundamentals in semiconductor devices and fabrication technology", Marcel Dekker, New York, 65-132 (1998).
  4. 17. L.F. Thompson, C.G. Wilson, and M.J. Bowden, "Introduction to Microlithogaphy, ACS Symposium Series 219, ACS, Washington, 87 (1983).
  5. 19. K. Miyagawa, K. Naruse, and S. Ohnishi, Progress in Organic Coatings, 42 , 20-28 (2001).
Times Cited (10) 〈TOP〉
  1. 夏峪霖(2009)。利用高分子光阻流變特性的控制以縮短彩色濾光片固烤製程週期。交通大學平面顯示技術碩士學位學程學位論文。2009。1-56。 
  2. 曾俊杰(2003)。環狀脂肪族高分子之合成及其在化學增幅正型光阻劑之應用研究。成功大學化學工程學系學位論文。2003。1-96。
  3. 洪壽懋(2004)。化學增感性負型光阻用脂環族高分子 之合成及特性研究。成功大學化學工程學系學位論文。2004。1-82。
  4. 楊金錢(2004)。光阻中寡聚合物對顯影圖形之影響。元智大學化學工程與材料科學學系學位論文。2004。1-83。
  5. 陳群奇(2005)。G-line光阻最佳化配方設計。臺北科技大學化學工程研究所學位論文。2005。1-90。
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